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The effect of different plasma gas environments on vermiculite layer
Applied clay science
Collision cascade and sputtering process in a polymer
JOURNAL OF PHYSICAL CHEMISTRY B
Nonadditive sputtering of silicon by keV energy molecular projectiles of heavy and light elements
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY
Phase formation in irradiated thin metallic bilayer at 500K temperature
RADIATION EFFECTS AND DEFECTS IN SOLIDS
Influence of ion bombarding on adhesion force of diamond nuclei on Si substrate
ACTA PHYSICA SINICA
First stages of diamond nucleation on iridium buffer layers
DIAMOND AND RELATED MATERIALS
Theoretical analysis of ion bombardment roles in the bias-enhanced nucleation process of CVD diamond
DIAMOND AND RELATED MATERIALS
Synthesis of highly oriented CVD diamond films by ultra short bias enhanced nucleation step
DIAMOND AND RELATED MATERIALS
Silicon substrate preparation for epitaxial diamond crystals
DIAMOND AND RELATED MATERIALS
Ion-induced electron emission from boron-doped diamond: effect of surface hydrogenation and sample temperature
DIAMOND AND RELATED MATERIALS
Carbon nitride thin-films deposited from coupled r.f.-magnetron sputteringand ion beam-assisted processes
DIAMOND AND RELATED MATERIALS
Cubic boron nitride film synthesis by reactive sputtering with pulsed RF substrate bias
DIAMOND AND RELATED MATERIALS
Synthesis of amorphous carbon nitride using reactive ion beam sputtering deposition with grazing bombardment
DIAMOND AND RELATED MATERIALS
Ultra-thin bi-axially textured IBAD MgO template layers resolved by grazing incidence X-ray diffraction
PHYSICA C
Effect of process variables on the structure, residual stress, and hardness of sputtered nanocrystalline nickel films
JOURNAL OF MATERIALS RESEARCH
Long-range effects in the FePd2Au alloy under ion bombardment
FUSION TECHNOLOGY
Estimates of differential sputtering yields for deposition applications
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
Preferential resputtering phenomenon on the surface of (100)-oriented Ni-Pt films: Effect of substrate bias during sputter deposition
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
Influence of substrate bias on the microstructure and internal stress in Cu films deposited by filtered cathodic vacuum arc
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
ZnS : TbOF thin films sputter deposited from a single versus separate, ZnSand TbOF targets
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
Low temperature deposition and characterization of polycrystalline Si films on polymer substrates
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
Influence of substrate bias on the structure and properties of (Ti,Al)N films deposited by filtered cathodic vacuum are
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
Theoretical sputtering yields of Al and Mg targets in physical vapor deposition processes
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
Depth of origin of sputtered atoms for elemental Al and Mg targets in physical vapor deposition processes
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
Anisotropic etching of polymer films by high energy (similar to 100s of eV) oxygen atom neutral beams
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
Fe and Fe-N films sputter deposited at liquid nitrogen temperature
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
Microstructure and mechanical/thermal properties of Cr-N coatings deposited by reactive unbalanced magnetron sputtering
SURFACE & COATINGS TECHNOLOGY
Characterization of alpha-phase aluminum oxide films deposited by filteredvacuum arc
SURFACE & COATINGS TECHNOLOGY
Production of low electron temperature ECR plasma for thin film deposition
SURFACE & COATINGS TECHNOLOGY
Molecular dynamics study of the role of ion bombardment in cubic boron nitride thin film deposition
SURFACE & COATINGS TECHNOLOGY
a-C : H thin films deposited by radio-frequency plasma: influence of gas composition on structure, optical properties and stress levels
SURFACE & COATINGS TECHNOLOGY
Energy distribution of ions bombarding TiO2 thin films during sputter deposition
SURFACE & COATINGS TECHNOLOGY
Synthesis of C-26 crystallite polyethylene by C-2(+) ion bombardment
HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION
Secondary ion emission from phosphatidic acid sandwich films under atomic and molecular primary ion bombardment
APPLIED SURFACE SCIENCE
Amorphous TiO2 in LP-OMCVD TiNxOy thin films revealed by XPS
APPLIED SURFACE SCIENCE
Making parabolic mirrors by electron-beam gun evaporation method with ion-assisted deposition
APPLIED SURFACE SCIENCE
A SIMS study on positive and negative ions sputtered from graphite by mass-separated low energy Ne+, N-2(+) and N+ ions
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Simulation on SIMS depth profiling of delta-doped layer including relaxation caused by defects
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Modification of a-Si under 100 eV Si atom bombardment
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
He++-irradiated beryllium-doped Al0.5Ga0.5As MBE layers
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Craters produced on Al, Cu and Au by Ar cluster impacts
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Electrical isolation of n-type InP by ion bombardment: Dose dependence andthermal stability
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
The effect of ion bombardment on the properties of TiOx films deposited bya modified ion-assisted PECVD technique
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Fast helium atom beams generated by pulsing the nozzle-skimmer discharge of a thermal metastable helium atom source
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Unstable etching of Si(110) with potassium hydroxide - art. no. 033309
PHYSICAL REVIEW B
Implantation and damage under oblique low-energy Si self-bombardment - art. no. 195319
PHYSICAL REVIEW B
Ion bombardment in surface passivation of GaAs
VACUUM
XPS, AES and EELS studies of Al surfaces
VACUUM
Surface nitridation processes and non-linear behaviour of the reactive magnetron discharge with titanium target
VACUUM
Influence of different physical factors on microstructure and properties of magnetron sputtered amorphous carbon films
THIN SOLID FILMS
Low temperature synthesis of dense SiO2 thin films by ion beam induced chemical vapor deposition
THIN SOLID FILMS
Ar stabilisation of the cubic/tetragonal phases of ZrO2 in thin films prepared by ion beam induced chemical vapour deposition
THIN SOLID FILMS
Effect of sputtering-gas pressure on properties of silicon nitride films produced by helicon plasma sputtering
THIN SOLID FILMS
Application of optical method for quantitative investigation of MgO erosion in a.c. plasma display panels
THIN SOLID FILMS
Photoinduced effects in RF and VHF a-Si : H films deposited with differention bombardment
THIN SOLID FILMS
Characterization of magnesium fluoride thin films produced by argon ion beam-assisted deposition
THIN SOLID FILMS
Corrosion performance of ultrathin carbon nitride overcoats synthesized bymagnetron sputtering
THIN SOLID FILMS
Oxygen adsorption on a Si(100) substrate: effects on secondary emission properties
SURFACE SCIENCE
Effect of the electronic subsystem excitation on the ionisation probability of atoms sputtered from metals by atomic and molecular projectiles
SURFACE SCIENCE
Temperature dependent morphological evolution of Pt(111) by ion erosion: destabilization, phase coexistence and coarsening
SURFACE SCIENCE
Mechanisms of pit coarsening in ion erosion of fcc(111) surfaces: a kinetic 3D lattice Monte-Carlo study
SURFACE SCIENCE
AFM investigation of selective etching mechanism of nanostructured silica
SURFACE SCIENCE
Molecular secondary particle emission from molecular overlayers under 10 keV Ar+ primary ion bombardment
SURFACE SCIENCE
Satellite sputtering in Sahurn's magnetosphere
PLANETARY AND SPACE SCIENCE
Thermal electrochemical, and plasma oxidation of Ti-50Zr, Cu-50Zr, Cn-50Ti, and Cu-33Ti-33Zr alloys
OXIDATION OF METALS
Mechanism of the chemical erosion of SiC under hydrogen irradiation
JOURNAL OF NUCLEAR MATERIALS
Chemical erosion of carbon doped with different fine-grain carbides
JOURNAL OF NUCLEAR MATERIALS
Methane formation in graphite and boron-doped graphite under simultaneous 0(+) and H+ irradiation
JOURNAL OF NUCLEAR MATERIALS
Chemical erosion of doped graphites for fusion devices
JOURNAL OF NUCLEAR MATERIALS
Carbonization process of Si(100) by ion-beam bombardment
JOURNAL OF CRYSTAL GROWTH
Interactions of adsorbates with locally strained substrate lattices
JOURNAL OF CHEMICAL PHYSICS
Steady state oxygen surface content in oxygen sputtered silicon at impact energy of 5 keV per atom
JOURNAL OF APPLIED PHYSICS
Damage production in a-Si under low-energy self-atom bombardment
JOURNAL OF APPLIED PHYSICS
Sputtering and in-plane texture control during the deposition of MgO
JOURNAL OF APPLIED PHYSICS
Instability in Si(110) etched with tetramethyl ammonium hydroxide
JOURNAL OF APPLIED PHYSICS
A review of SiO2 etching studies in inductively coupled fluorocarbon plasmas
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Quantum dot and hole formation in sputter erosion
APPLIED PHYSICS LETTERS
Effect of the density of collision cascades on implantation damage in GaN
APPLIED PHYSICS LETTERS
Phase formation and stability in reactively sputter deposited yttria-stabilized zirconia coatings
JOURNAL OF THE AMERICAN CERAMIC SOCIETY
TiO2 (110) surface preparation by UV light irradiation for scanning Tunneling microscopy observations
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Formation of vertically aligned carbon nanotubes by dual-RF-plasma chemical vapor deposition
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
Depth profiles obtained from simulation of GaAs bombarded with noble gas ions using MARLOWE
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Particle simulation of a radiofrequency magnetron discharge
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS
Proposal for a hardness measurement technique without indentor by gas-cluster-beam bombardment
PHYSICAL REVIEW B
Statistical models for carbon-nitrogen film growth
PHYSICAL REVIEW E
Micromachining of buried micro channels in silicon
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Fundamental processes of plasma-surface interactions
ADVANCES IN ATOMIC, MOLECULAR, AND OPTICAL PHYSICS, VOL 43
Carbon film deposited by mass-selected low energy ion beam technique and ion bombardment effect
ACTA PHYSICA SINICA
Atomic force microscopy investigation of the surface modification of highly oriented pyrolytic graphite by oxygen plasma
JOURNAL OF MATERIALS CHEMISTRY
Contribution of singly and doubly ionized argon to the autoionization (Auger) spectrum of argon excited by bombardment of magnesium and scandium surfaces
JOURNAL OF PHYSICS-CONDENSED MATTER
High-temperature-superconductor coated conductors: technical progress in Japan
SUPERCONDUCTOR SCIENCE & TECHNOLOGY
High quality heteroepitaxial diamond films on silicon: recent progresses
DIAMOND AND RELATED MATERIALS
Growth, doping and applications of cubic boron nitride thin films
DIAMOND AND RELATED MATERIALS
X-ray photoelectron spectroscopy characterization of CNx thin films deposited by electron beam evaporation and nitrogen ion bombardment
DIAMOND AND RELATED MATERIALS
New approach to understanding the reactive magnetron sputtering of hard carbon nitride films
DIAMOND AND RELATED MATERIALS
Crystalline structures of carbon complexes in amorphous carbon films
DIAMOND AND RELATED MATERIALS
NEXAFS spectroscopy of crystalline and ion beam irradiated diamond surfaces
DIAMOND AND RELATED MATERIALS
Ion polishing of a diamond (100) surface artificially roughened on the nanoscale
DIAMOND AND RELATED MATERIALS
Relaxed SiGe buffer layer growth with point defect injection
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
Determination of the layered structure in Mo/Si multilayers by grazing incidence X-ray reflectometry
PHYSICA B