Catalogo Articoli (Spogli Riviste)

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La ricerca find articoli where soggetti phrase all words 'SINX FILM' sort by level,fasc_key/DESCEND, pagina_ini_num/ASCEND ha restituito 7 riferimenti
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    1. Xu, YY; Ogishima, T; Korzec, D; Nakanishi, Y; Hatanaka, Y
      Deposition of SiNx thin film using mu-SLAN surface wave plasma source

      JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
    2. BJORKQVIST M; GOTHELID M; GREHK TM; KARLSSON UO
      NH3 ON SI(111)7X7 - DISSOCIATION AND SURFACE-REACTIONS

      Physical review. B, Condensed matter
    3. TAKECHI K; TAKAGI T; KANEKO S
      THE MECHANISM AT WORK IN 40 MHZ DISCHARGE SIH4 NH3/N-2 PLASMA CHEMICAL-VAPOR-DEPOSITION OF SINX FILMS AT VERY RATES/

      JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
    4. JIANG ZT; YAMAGUCHI T; OHSHIMO K; AOYAMA M; ASINOVSKY L
      THE APPLICATION OF SILICON RICH NITRIDE FILMS FOR USE AS DEEP-ULTRAVIOLET LITHOGRAPHY PHASE-SHIFTING MASKS

      JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
    5. MATSUURA T; TAGUCHI M; KAWATA K; TSUTSUMI K
      DEFORMATION CONTROL OF MICROBRIDGES FOR FLOW SENSORS

      Sensors and actuators. A, Physical
    6. TAGUCHI M; KAWATA K; MATSUURA T; TSUTSUMI K
      DEFORMATION CONTROL OF METAL NITRIDE MICROBRIDGES/

      IEICE transactions on electronics
    7. TABE M; YAMAMOTO T
      INITIAL-STAGES OF NITRIDATION OF SI(111) SURFACES - X-RAY PHOTOELECTRON-SPECTROSCOPY AND SCANNING-TUNNELING-MICROSCOPY STUDIES

      Surface science


ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 07/08/20 alle ore 21:23:26