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La ricerca find articoli where soggetti phrase all words 'MAGNETRON' sort by level,fasc_key/DESCEND, pagina_ini_num/ASCEND ha restituito 1212 riferimenti
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    1. Leinartas, K; Samuleviciene, M; Bagdonas, A; Sudavicius, A; Lisauskas, V; Juzeliunas, E
      Electrochemical and microgravimetric characterization of magnetron-sputtered Fe-Cr-Ni-Ta and Fe-Cr-Ni alloy films in neutral and strongly acidic media

      ELECTROCHEMISTRY COMMUNICATIONS
    2. Asamaki, T; Kato, T; Saito, S; Kasukawa, T; Geka, H; Motohashi, K
      Filling of deep-sub-mu m through holes and trenches by high vacuum planar magnetron sputter

      ELECTROCHEMISTRY
    3. Naumov, VV; Bochkarev, VF; Trushin, OS; Goryachev, AA; Khasanov, EG; Lebedev, AA; Kunitsyn, AS
      The effect of low-energy ion bombardment on the density and crystal structure of thin films

      TECHNICAL PHYSICS
    4. York, RA; Nagra, AS; Periaswamy, P; Auciello, O; Streiffer, SK; Im, J
      Synthesis and characterization of (BxSr1-x)Ti1+yO3+z thin films and integration into microwave varactors and phase shifters

      INTEGRATED FERROELECTRICS
    5. Park, SS
      The post annealing effects on ferroelectric properties of SrBi2Ta2O9 thin films prepared by RF magnetron sputtering

      INTEGRATED FERROELECTRICS
    6. Krauss, AR; Auciello, O; Dhote, AM; Im, J; Aggarwal, S; Ramesh, R; Irene, EA; Gao, Y; Mueller, AH
      Studies of ferroelectric film growth and capacitor interface processes viain situ analytical techniques and correlation with electrical properties

      INTEGRATED FERROELECTRICS
    7. De Winter, G; Denul, J; De Gryse, R
      Deposition of biaxially aligned yttria stabilized zirconia layers on metaltape by modified magnetron sputtering

      IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
    8. Denul, J; De Winter, G; De Gryse, R
      YBa2CU3O7-x sputter deposition from rotatable targets: a scalable approachfor YBa2CU3O7-x coated conductors

      IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
    9. Clark, WW; Beatrice, JM; Lichtenberger, AW
      Effects of geometry and hardware on the stress of Nb thin films

      IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
    10. Iosad, NN; Roddatis, VV; Polyakov, SN; Varlashkin, AV; Jackson, BD; Dmitriev, PN; Gao, JR; Klapwijk, TM
      Superconducting transition metal nitride films for THz SIS mixers

      IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
    11. Efeoglu, I; Celik, A
      Mechanical and structural properties of AISI 8620 steel TiN coated, nitrided and TiN coated plus nitrided

      MATERIALS CHARACTERIZATION
    12. Al, R; Wasa, K
      Deposition of superlattice PbTiO3/(Pb, La)TiO3

      PROGRESS IN NATURAL SCIENCE
    13. Song, JQ; Liu, ZT; Yu, ZQ; Geng, DS; Zheng, XL
      Antireflective and protective films preparation on ZnS dome

      JOURNAL OF INFRARED AND MILLIMETER WAVES
    14. Dong, YM; Chen, J; Tang, NY; Ye, CN; Wu, XM; Zhuge, LJ; Yao, WG
      Photoluminescence from Ge-SiO2 thin films and its mechanism

      CHINESE SCIENCE BULLETIN
    15. Kim, JY; Sohn, D; Kim, ER
      Polymer-based multi-layer conductive electrode film for plastic LCD applications

      APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
    16. Drusedau, TP; Koppenhagen, K; Blasing, J; John, TM
      Texturing effects in molybdenum and aluminum nitride films correlated to energetic bombardment during sputter deposition

      APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
    17. Schuler, A; Videnovic, IR; Oelhafen, P; Brunold, S
      Titanium-containing amorphous hydrogenated silicon carbon films (a-Si : C : H/Ti) for durable solar absorber coatings

      SOLAR ENERGY MATERIALS AND SOLAR CELLS
    18. Jeong, WJ; Park, GC
      Electrical and optical properties of ZnO thin film as a function of deposition parameters

      SOLAR ENERGY MATERIALS AND SOLAR CELLS
    19. Li, Q; Zhou, ZF; Lee, CS; Lee, ST; Bello, I
      Synthesis and characterization of cubic boron nitride films: substrate bias and ion flux effects

      DIAMOND AND RELATED MATERIALS
    20. Zheng, WT; Guo, JH; Sakamoto, Y; Takaya, M; Li, XT; Chao, PJ; Jin, ZS; Xing, KZ; Sundgren, JE
      Chemical bonding in carbon nitride films studied by X-ray spectroscopies

      DIAMOND AND RELATED MATERIALS
    21. Jimenez, I; Gago, R; Albella, JM; Terminello, LJ
      X-Ray absorption studies of bonding environments in graphitic carbon nitride

      DIAMOND AND RELATED MATERIALS
    22. Oliveira, IC; Massi, M; Santos, SG; Otani, C; Maciel, HS; Mansano, RD
      Dielectric characteristics of AlN films grown by d.c.-magnetron sputteringdischarge

      DIAMOND AND RELATED MATERIALS
    23. Lousa, A; Gimeno, S
      Quantification of ion bombardment effects in c-BN thin films deposited by rf magnetron sputtering

      DIAMOND AND RELATED MATERIALS
    24. Gagaoudakis, E; Bender, M; Douloufakis, E; Katsarakis, N; Natsakou, E; Cimalla, V; Kiriakidis, G
      The influence of deposition parameters on room temperature ozone sensing properties of InOx films

      SENSORS AND ACTUATORS B-CHEMICAL
    25. Chen, M; Pei, ZL; Sun, C; Gong, J; Huang, RF; Wen, LS
      ZAO: an attractive potential substitute for ITO in flat display panels

      MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
    26. Wakana, H; Michikami, O
      Preparation of CeO2 backslash SrTiO3 bilayers as a barrier material for SIS Josephson junctions

      PHYSICA C
    27. Denul, J; De Winter, G; De Gryse, R
      Ion assisted deposition of biaxially aligned YSZ layers on metal tape

      PHYSICA C
    28. Wakana, H; Michikami, O
      High-quality a-axis oriented EuBa2Cu3O7-delta films on sapphire substrates

      PHYSICA C
    29. Baumann, FH; Chopp, DL; de la Rubia, TD; Gilmer, GH; Greene, JE; Huang, H; Kodambaka, S; O'Sullivan, P; Petrov, I
      Multiscale modeling of thin-film deposition: Applications to Si device processing

      MRS BULLETIN
    30. Thompson, SM; Bradley, JW
      The effect of rotating cylindrical Langmuir probes in magnetron plasmas

      CONTRIBUTIONS TO PLASMA PHYSICS
    31. Kelly, PJ; Hall, R; O'Brien, J; Bradley, JW; Henderson, P; Roche, G; Arnell, RD
      Studies of mid-frequency pulsed dc biasing

      JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
    32. Chun, JS; Desjardins, P; Lavoie, C; Petrov, I; Cabral, C; Greene, JE
      Interfacial reaction pathways and kinetics during annealing of 111-textured Al-TiN bilayers: A synchrotron x-ray diffraction and transmission electron microscopy study

      JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
    33. Tait, RN; Mirfazli, A
      Low temperature aluminum nitride deposition on aluminum by rf reactive sputtering

      JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
    34. Schonjahn, C; Ehlasarian, AP; Lewis, DB; New, R; Munz, WD; Twesten, RD; Petrov, I
      Optimization of in situ substrate surface treatment in a cathodic arc plasma: A study by TEM and plasma diagnostics

      JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
    35. Cheng, YH; Tay, BK; Lau, SP; Shi, X
      Influence of substrate bias on the structure and properties of (Ti,Al)N films deposited by filtered cathodic vacuum are

      JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
    36. Cheng, YH; Tay, BK; Lau, SP; Shi, X; Chua, HC
      Characterization of (Ti,Al)N films deposited by off-plane double bend filtered cathodic vacuum arc

      JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
    37. Chun, JS; Carlsson, JRA; Desjardins, P; Bergstrom, DB; Petrov, I; Greene, JE; Lavoie, C; Cabral, C; Hultman, L
      Synchrotron x-ray diffraction and transmission electron microscopy studiesof interfacial reaction paths and kinetics during annealing of fully-002-textured Al/TiN bilayers

      JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
    38. Tunaboylu, B; Sashital, SR; Harvey, P; Esener, SC
      Synthesis and properties of KTN films by sol-gel deposition and RF-magnetron sputtering

      FERROELECTRICS LETTERS SECTION
    39. Martin-Litas, I; Vinatier, P; Levasseur, A; Dupin, JC; Gonbeau, D
      Promising thin films (WO1.05S2 and WO1.35S2.2) as positive electrode materials in microbatteries

      JOURNAL OF POWER SOURCES
    40. Whitacre, JF; West, WC; Ratnakumar, BV
      The influence of target history and deposition geometry on RF magnetron sputtered LiCoO2 thin films

      JOURNAL OF POWER SOURCES
    41. Mattox, DM
      Plasma technology: Arcs, microarcs & flashovers

      PLATING AND SURFACE FINISHING
    42. Mattox, DM
      Reactive sputter deposition

      PLATING AND SURFACE FINISHING
    43. Matthews, A; Leyland, A
      Developments in PVD tribological coatings

      HEAT TREATMENT OF METALS
    44. Chen, SC; Kuo, PC; Lie, CT; Hua, JT
      Microstructure and coercivity of granular FePt-AlN thin films

      JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
    45. Lee, JC; You, DG; Le, SY; Kim, SJ; Kim, CS; Jeong, K
      Enhancement of magnetoresistance in La0.75Ca0.25MnO3 thin films grown on Si(100) substrates

      JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
    46. Cho, YS; Hwang-Bo, JS; Kim, YH; Park, SI; Lee, SW; Kim, CS
      Magnetoresistance of La1-xSrxMnO3 films deposited by RF magnetron co-sputtering

      JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
    47. Jia, H; Veldeman, J; Burgelman, M
      Magnetic properties and microstructure of CoCr and CoCrTa thin films sputtered at high pressure on a PET substrate

      JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
    48. Girka, VO
      Application of electron cyclotron surface modes to solids processing

      PHYSICA SCRIPTA
    49. Serebryannikov, A; Schunemann, K
      Partial modal degeneracy in lossy magnetron cavities

      ELECTROMAGNETICS
    50. Lembke, MI; Lewis, DB; Munz, WD; Titchmarsh, JM
      Joint second prize - Significance of Y and Cr in TiAlN hard coatings for dry rich speed cutting

      SURFACE ENGINEERING
    51. Munz, WD; Lewis, DB; Hovsepian, PE; Schonjahn, C; Ehiasarian, A; Smith, IJ
      Industrial scale manufactured superlattice hard PVD coatings

      SURFACE ENGINEERING
    52. Lauwerens, W; De Boeck, A; Thijs, M; Claessens, S; Van Stappen, M; Steenackers, P
      PVD Al-Ti and Al-Mn coatings for high temperature corrosion protection of sheet steel

      SURFACE & COATINGS TECHNOLOGY
    53. Tanaka, Y; Ichimiya, N; Onishi, Y; Yamada, Y
      Structure and properties of Al-Ti-Si-N coatings prepared by the cathodic arc ion plating method for high speed cutting applications

      SURFACE & COATINGS TECHNOLOGY
    54. Hsieh, JH; Zhang, WH; Li, C; Sun, CQ
      Characterization of (Ti-x Cr0.6-x)N-0.4 coatings and their tribological behaviors against an epoxy molding compound

      SURFACE & COATINGS TECHNOLOGY
    55. Luo, Q; Rainforth, WM; Munz, WD
      Wear mechanisms of monolithic and multicomponent nitride coatings grown bycombined arc etching and unbalanced magnetron sputtering

      SURFACE & COATINGS TECHNOLOGY
    56. Glocker, DA; Romach, MM; Lindberg, VW
      Recent developments in inverted cylindrical magnetron sputtering

      SURFACE & COATINGS TECHNOLOGY
    57. Nouveau, C; Djouadi, MA; Deces-Petit, C; Beer, P; Lambertin, M
      Influence of CrxNy coatings deposited by magnetron sputtering on tool service life in wood processing

      SURFACE & COATINGS TECHNOLOGY
    58. Regent, F; Musil, J
      Magnetron sputtered Cr-Ni-N and Ti-Mo-N films: comparison of mechanical properties

      SURFACE & COATINGS TECHNOLOGY
    59. Polakova, H; Kubasek, M; Cerstvy, R; Musil, J
      Control of structure in magnetron sputtered thin films

      SURFACE & COATINGS TECHNOLOGY
    60. Sanchette, F; Billard, A
      Main features of magnetron sputtered aluminium-transition metal alloy coatings

      SURFACE & COATINGS TECHNOLOGY
    61. Bradley, JW; Backer, H; Kelly, PJ; Arnell, RD
      Space and time resolved Langmuir probe measurements in a 100 kHz pulsed rectangular magnetron system

      SURFACE & COATINGS TECHNOLOGY
    62. Misina, M; Shaginyan, LR; Macek, M; Panjan, P
      Energy resolved ion mass spectroscopy of the plasma during CV reactive magnetron sputtering

      SURFACE & COATINGS TECHNOLOGY
    63. Musil, J; Vlcek, J
      Magnetron sputtering of hard nanocomposite coatings and their properties

      SURFACE & COATINGS TECHNOLOGY
    64. Duck, A; Gamer, N; Gesatzke, W; Griepentrog, M; Osterle, W; Sahre, M; Urban, I
      Ti/TiN multilayer coatings: deposition technique, characterization and mechanical properties

      SURFACE & COATINGS TECHNOLOGY
    65. Musil, J; Hruby, H; Zeman, P; Zeman, H; Cerstvy, R; Mayrhofer, PH; Mitterer, C
      Hard and superhard nanocomposite Al-Cu-N films prepared by magnetron sputtering

      SURFACE & COATINGS TECHNOLOGY
    66. Frach, P; Goedicke, K; Gottfried, C; Bartzsch, H
      A versatile coating tool for reactive in-line sputtering in different pulse modes

      SURFACE & COATINGS TECHNOLOGY
    67. Kelly, PJ; Hall, R; O'Brien, J; Bradley, JW; Roche, G; Arnell, RD
      Substrate effects during mid-frequency pulsed DC biasing

      SURFACE & COATINGS TECHNOLOGY
    68. Hubicka, Z; Sicha, M; Pajasova, L; Soukup, L; Jastrabik, L; Chvostova, D; Wagner, T
      CNx coatings deposited by pulsed RF supersonic plasma jet: hardness, nitrogenation and optical properties

      SURFACE & COATINGS TECHNOLOGY
    69. Mientus, R; Ellmer, K
      Reactive magnetron sputtering of tin-doped indium oxide (ITO): influence of argon pressure and plasma excitation mode

      SURFACE & COATINGS TECHNOLOGY
    70. Sako, T; Ohmi, A; Yumoto, H; Nishiyama, K
      ITO-film gas sensor for measuring photodecomposition of NO2 gas

      SURFACE & COATINGS TECHNOLOGY
    71. Gobel, T; Menzel, S; Hecker, M; Bruckner, W; Wetzig, K; Genzel, C
      Stress measurements in thermal loaded (Ti,Al) N hard coatings

      SURFACE & COATINGS TECHNOLOGY
    72. Silva, MFV; Nicholls, JR
      A model for calculating the thickness profile of TiB2 and Al multilayer coatings produced by planar magnetron sputtering

      SURFACE & COATINGS TECHNOLOGY
    73. Rigato, V; Maggioni, G; Patelli, A; Antoni, V; Serianni, G; Spolaore, M; Tramontin, L; Depero, L; Bontempi, E
      Effects of plasma non-homogeneity on the physical properties of sputtered thin films

      SURFACE & COATINGS TECHNOLOGY
    74. Kohlscheen, J; Stock, HR; Mayr, P
      Chemical bonding in magnetron sputtered TiNx coatings and its relation to diamond turnability

      SURFACE & COATINGS TECHNOLOGY
    75. Berlind, T; Hellgren, N; Johansson, MP; Hultman, L
      Microstructure, mechanical properties, and wetting behavior of Si-C-N thinfilms grown by reactive magnetron sputtering

      SURFACE & COATINGS TECHNOLOGY
    76. Billard, A; Mercs, D; Perry, F; Frantz, C
      Square-wave low-frequency modulation of the discharge current for high rate deposition of stoichiometric ceramic films

      SURFACE & COATINGS TECHNOLOGY
    77. Mori, T; Fukuda, S; Takemura, Y
      Improvement of mechanical properties of Ti/TiN multilayer film deposited by sputtering

      SURFACE & COATINGS TECHNOLOGY
    78. Wang, JH; Lauwerens, W; Wieers, E; Stals, LM; He, JW; Celis, JP
      Structure and tribological properties of MoSx coatings prepared by bipolarDC magnetron sputtering

      SURFACE & COATINGS TECHNOLOGY
    79. Pelletier, J; Lacoste, A; Arnal, Y; Lagarde, T; Lincot, C; Hertz, D
      New trends in DECR plasma technology: applications to novel duplex treatments and process combinations with extreme plasma specifications

      SURFACE & COATINGS TECHNOLOGY
    80. Chang, YC; Duh, JG; Chen, YI
      Fabrication and crystallization behaviors of sputtered Ni-Cu-P films on tool steel

      SURFACE & COATINGS TECHNOLOGY
    81. Musil, J; Karvankova, P; Kasl, J
      Ward and superhard Zr-Ni-N nanocomposite films

      SURFACE & COATINGS TECHNOLOGY
    82. Seok, JW; Jadeed, NM; Lin, RY
      Sputter-deposited nanocrystalline Cr and CrN coatings on steels

      SURFACE & COATINGS TECHNOLOGY
    83. Martin, N; Santo, AME; Sanjines, R; Levy, F
      Energy distribution of ions bombarding TiO2 thin films during sputter deposition

      SURFACE & COATINGS TECHNOLOGY
    84. Wang, DY; Chiu, MC
      Characterization of Cr2O3/CrN duplex coatings for injection molding applications

      SURFACE & COATINGS TECHNOLOGY
    85. Chun, SY; Chayahara, A
      Nucleation and growth of vacuum are deposited gold films under pulsed bias

      SURFACE & COATINGS TECHNOLOGY
    86. Ji, Z; Haynes, JA; Ferber, MK; Rigsbee, JM
      Metastable tetragonal zirconia formation and transformation in reactively sputter deposited zirconia coatings

      SURFACE & COATINGS TECHNOLOGY
    87. Bradley, JW; Backer, H; Kelly, PJ; Arnell, RD
      Time-resolved Langmuir probe measurements at the substrate position in a pulsed mid-frequency DC magnetron plasma

      SURFACE & COATINGS TECHNOLOGY
    88. Okimura, K
      Low temperature growth of rutile TiO2 films in modified rf magnetron sputtering

      SURFACE & COATINGS TECHNOLOGY
    89. Lee, CH; Lee, TY
      Preparation and properties of rf sputtered Pb(Mg1/3Ta2/3)O-3 thin films

      MATERIALS CHEMISTRY AND PHYSICS
    90. Beensh-Marchwicka, GM; Prociow, E; Mielcarek, W
      Structure of Ge-based films exhibiting thermoelectric effect

      CRYSTAL RESEARCH AND TECHNOLOGY
    91. Schunemann, K; Serebryannikov, A; Moiseenko, A
      Pole-location-based estimates of eigenmode characteristics of cylindrical corrugated structures

      INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES
    92. Yeh, YS; Chang, TH; Fan, CT
      Beam characteristics of mechanically tunable magnetron injection guns

      INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES
    93. Kulagin, OP
      The millimeter band oscillator in the large-orbital resonance mode

      INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES
    94. Tsimring, SE
      Gyrotron electron beams: Velocity and energy spread and beam instabilities

      INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES
    95. Kyrsta, S; Cremer, R; Neuschutz, D; Laurenzis, M; Bolivar, PH; Kurz, H
      Deposition and characterization of Ge-Sb-Te layers for applications in optical data storage

      APPLIED SURFACE SCIENCE
    96. Bartella, J; Schroeder, J; Witting, K
      Characterization of ITO- and TiOxNy films by spectroscopic ellipsometry, spectraphotometry and XPS

      APPLIED SURFACE SCIENCE
    97. Wang, XJ; Li, HD; Fei, YJ; Wang, X; Xiong, YY; Nie, YX; Feng, KA
      XRD and Raman study of vanadium oxide thin films deposited on fused silicasubstrates by RF magnetron sputtering

      APPLIED SURFACE SCIENCE
    98. Perjeru, F; Bai, X; Ortiz-Libreros, MI; Higgins, R; Kordesch, ME
      ScN/GaN heterojunctions: fabrication and characterization

      APPLIED SURFACE SCIENCE
    99. Ortiz-Libreros, MI; Perjeru, F; Bai, X; Kordesch, ME
      Investigation of metal contacts on ScN

      APPLIED SURFACE SCIENCE
    100. Nosaka, T; Yoshitake, M; Okamoto, A; Ogawa, S; Nakayama, Y
      Thermal decomposition of copper nitride thin films and dots formation by electron beam writing

      APPLIED SURFACE SCIENCE


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Documento generato il 12/08/20 alle ore 01:17:42