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Current-voltage characteristics in a flame plasma: analysis for positive and negative ions, with applications
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY
Product ion distributions and rate coefficients for the attachment reactions of electrons with CHCl2Br, CCl2Br2, and CHClBr2
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY
Inward turbulent particle transport in a helical plasma heated by neutral beam injection
PHYSICS OF PLASMAS
Probe-assisted study of the erosion plume upon the ablation of tantalum invacuum by the 308-nm excimer laser radiation
QUANTUM ELECTRONICS
Measurement of edge plasma parameters and their electrostatic fluctuationson the HT-7 superconducting tokamak
ACTA PHYSICA SINICA
Diagnostic of Rf plasma by using langmuir probe and its numerical processing
ACTA PHYSICA SINICA
Quantification of ion bombardment effects in c-BN thin films deposited by rf magnetron sputtering
DIAMOND AND RELATED MATERIALS
On the influence of electron energy on iodine-doped polyaniline formation by plasma polymerization
JOURNAL OF POLYMER SCIENCE PART B-POLYMER PHYSICS
Stark-broadened hydrogen line profiles predicted by the model microfield method for calculating electron number densities
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY
Characteristics of VHF-excited SiH4 plasmas using a ladder-shaped electrode
SURFACE & COATINGS TECHNOLOGY
Space and time resolved Langmuir probe measurements in a 100 kHz pulsed rectangular magnetron system
SURFACE & COATINGS TECHNOLOGY
Measurements of negative ion density in O-2/Ar electron cyclotron resonance plasma
SURFACE & COATINGS TECHNOLOGY
Fluid dynamic modelling and experimental diagnostics of an inductive high density plasma source (ICP)
SURFACE & COATINGS TECHNOLOGY
Measurement of sheath expansion in plasma source ion implantation
SURFACE & COATINGS TECHNOLOGY
The measurement of nitrogen ion species ratio in inductively coupled plasma source ion implantation
SURFACE & COATINGS TECHNOLOGY
A study of plasma parameters in a BAI 730 M triode ion plating system by means of a Langmuir probe and plasma mass and energy spectroscopy
SURFACE & COATINGS TECHNOLOGY
Time-resolved Langmuir probe measurements at the substrate position in a pulsed mid-frequency DC magnetron plasma
SURFACE & COATINGS TECHNOLOGY
Growth of atomically flat homoepitaxial magnesium oxide thin films by metal-organic chemical vapor deposition
MATERIALS CHEMISTRY AND PHYSICS
An optimal neural network plasma model: a case study
CHEMOMETRICS AND INTELLIGENT LABORATORY SYSTEMS
Effects of the modified materials on plasma in surface modification by plasma
APPLIED SURFACE SCIENCE
Bohm criterion in magnetron plasma
VACUUM
Estimate of the negative ion density in reactive gas plasmas
THIN SOLID FILMS
Different operational regimes in a helicon plasma source
REVIEW OF SCIENTIFIC INSTRUMENTS
Plasma flow measurement using directional Langmuir probe under weakly ion-magnetized conditions
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN
Experimental evidence of intermittent convection in the edge of magnetic confinement devices - art. no. 065001
PHYSICAL REVIEW LETTERS
Flow measurements in the edge plasma of Tore Supra
JOURNAL OF NUCLEAR MATERIALS
Plasma profiles in the inner divertor of ASDEX Upgrade
JOURNAL OF NUCLEAR MATERIALS
Density fluctuations at high density in the ergodic divertor configurationof Tore Supra
JOURNAL OF NUCLEAR MATERIALS
Experimental investigations of the SOL plasma in the MAST tokamak
JOURNAL OF NUCLEAR MATERIALS
Narrow power deposition profiles on the JET divertor target
JOURNAL OF NUCLEAR MATERIALS
Divertor geometry effects on detachment in TCV
JOURNAL OF NUCLEAR MATERIALS
Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laserThomson scattering
APPLIED PHYSICS LETTERS
Temporal and spatial evolution of the electronic density and temperature of the plasma produced by laser ablation of LiNbO3
APPLIED PHYSICS LETTERS
Effect of gas composition on TiN thin-film fabrication in N-2/H-2/Ar/TiCl4inductively coupled plasma-enhanced chemical vapor deposition system
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Characteristics of very-high-frequency-excited SiH4 plasmas using a ladder-shaped electrode
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Overdense plasma production in a low-power microwave discharge electron source
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Spatial structure of electronegative Ar/CF4 plasmas in capacitive RF discharges
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Spatial profile measurements of charged particles in capacitively-coupled RF (13.56 MHz) oxygen discharges
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Competition between nondissociative and dissociative electron attachment to halogenated cyclic alkenes in the gas phase
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY
Nonlocal electron kinetics in a planar inductive helium discharge
PHYSICAL REVIEW E
The diagnostics of RF glow discharge plasma by a probe and its data process
ACTA PHYSICA SINICA
A new inductively coupled plasma source design with improved azimuthal symmetry control
PLASMA SOURCES SCIENCE & TECHNOLOGY
Ion flux, ion energy distribution and neutral density in an inductively coupled argon discharge
PLASMA SOURCES SCIENCE & TECHNOLOGY
Time-resolved investigations of pulsed microwave excited plasmas
PLASMA SOURCES SCIENCE & TECHNOLOGY
Multiple harmonic compensation of Langmuir probes in rf discharges
MEASUREMENT SCIENCE & TECHNOLOGY
A comparison of flow velocities measured using an impact-pressure probe and electron time of flight in a supersonic flow. Implications for electron thermalization
MEASUREMENT SCIENCE & TECHNOLOGY
Effect of microwave power on diamond-like carbon films deposited using electron cyclotron resonance chemical vapor deposition
DIAMOND AND RELATED MATERIALS
Analysis of chlorine-containing plasmas applied in III/V semiconductor processing
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
Diagnostic studies of aluminum etching in an inductively coupled plasma system: Determination of electron temperatures and connections to plasma-induced damage
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
Diagnostics of an inductively coupled CF4/Ar plasma
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
Automated electron cyclotron resonance plasma enhanced chemical vapor deposition system for the growth of rugate filters
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
Measurements of plasma properties in an interface for helium ICP-MS using a Langmuir probe
BUNSEKI KAGAKU
Development of plasma chip
SURFACE & COATINGS TECHNOLOGY
Epitaxial growth of 3C-SiC films on Si substrates by triode plasma CVD using dimethylsilane
APPLIED SURFACE SCIENCE
Measurements of negative ion density in fluorocarbon ECR plasma
VACUUM
Electrical and optical characterisation of capacitively and inductively coupled GEC reference cells
VACUUM
Plasma diagnostics of a PECVD system using different RF electrode configurations
VACUUM
Fast reciprocating probe assembly for the Hanbit magnetic mirror device
REVIEW OF SCIENTIFIC INSTRUMENTS
Investigation of edge plasmas in the anchor cell region of GAMMA 10
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN
Angular distribution of electron temperature and density in a laser-ablation plume
PHYSICAL REVIEW LETTERS
Diagnostics of inductively coupled chlorine plasmas: Measurement of Cl-2(+) and Cl+ densities
JOURNAL OF APPLIED PHYSICS
Langmuir probe measurement of cesium plasma in thermionic energy converter
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Gap length dependence of electron energy distribution in low-pressure Ar capacitively coupled RF discharges
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Experimental investigations on Ne/CF4 inductively coupled discharges
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Study of the electron ion recombination in high pressure flowing afterglow: recombination of NH4 center dot+ (NH3)(2)
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY
High density plasmas for micro- and optoelectronics processing
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS
ICP reactors for plasma processing
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS
Trace rare gases optical emission spectroscopy: Nonintrusive method for measuring electron temperatures in low-pressure, low-temperature plasmas
PHYSICAL REVIEW E
Time-resolved electrostatic probe studies of a pulsed inductively-coupled plasma
PLASMA SOURCES SCIENCE & TECHNOLOGY
Electron density measurements in a slot antenna microwave plasma source bymeans of the plasma oscillation method
PLASMA SOURCES SCIENCE & TECHNOLOGY
Measurements of ECR silane plasma parameters
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
The poloidal variation of the radial transport due to electrostatic fluctuations in toroidal magnetic confinement experiments
PLASMA PHYSICS AND CONTROLLED FUSION
Effects of variously configured magnets on the characteristics of inductively coupled plasmas
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
Characterization of the ion beam inside the skimmer cone of an inductivelycoupled plasma mass spectrometer by laser excited atomic and ionic fluorescence
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY
Studies of the ablation plume arising in 193 nm laser irradiation of graphite in vacuum
SURFACE & COATINGS TECHNOLOGY
Radio-frequency plasma production using a ladder-shaped antenna
SURFACE & COATINGS TECHNOLOGY
Inhomogeneous deposition of TiN by pulsed PACVD caused by a plasma dynamiceffect
SURFACE & COATINGS TECHNOLOGY
Determination of negative-ion density in an electron cyclotron resonance C4F8 plasma
SURFACE & COATINGS TECHNOLOGY
Automatic Langmuir probe measurement in a magnetron sputtering system
SURFACE & COATINGS TECHNOLOGY
Spatially resolved measurements of plasma parameters is a broad-beam ion source
SURFACE & COATINGS TECHNOLOGY
Two-dimensional radio-frequency methane plasma simulation: Comparison withexperiments
IEEE TRANSACTIONS ON PLASMA SCIENCE
Two-dimensional mapping of electron distribution functions in low pressureICP
IEEE TRANSACTIONS ON PLASMA SCIENCE
Interaction between moderately high power microwaves and plasma in corrugated wall waveguides
IEEE TRANSACTIONS ON PLASMA SCIENCE
Characterization of an unbalanced magnetron for composite film (metal/C : H) deposition
VACUUM
Parameters measurement of ECR C4F8/Ar plasma
THIN SOLID FILMS
Compact floating ion energy analyzer for measuring energy distributions ofions bombarding radio-frequency biased electrode surfaces
REVIEW OF SCIENTIFIC INSTRUMENTS
Spatial profiles of a planar inductively coupled discharge in argon
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Radial behaviour of the electron energy distribution function in the cylindrical magnetron discharge in argon
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Turbulent SOL transport in stellarators and tokamaks
JOURNAL OF NUCLEAR MATERIALS
Measured and simulated poloidal asymmetries of the FTU SOL in the toroidallimiter configuration
JOURNAL OF NUCLEAR MATERIALS
An evaluation of kinetic effects in the DIII-D divertor
JOURNAL OF NUCLEAR MATERIALS
Turbulence in boundary plasmas
JOURNAL OF NUCLEAR MATERIALS
Effects of temperature gradients and sheath power transmission on Langmuirprobes
JOURNAL OF NUCLEAR MATERIALS
Asymmetries in the divertor power loading in START
JOURNAL OF NUCLEAR MATERIALS
A fast scanning Langmuir probe system for ASDEX-Upgrade divertor
JOURNAL OF NUCLEAR MATERIALS
Plasma absorption probe for measuring electron density in an environment soiled with processing plasmas
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Characteristics of very high frequency plasma produced using a ladder-shaped electrode
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
PROPAGATION OF A DISTURBANCE CREATED BY A PROBE IN ELECTRON COLLECTION
Physics of plasmas
TRANSVERSE-PLASMA CONDUCTIVITY AND THE THEORY OF A PROBE IN A MAGNETIC-FIELD
Plasma physics reports
EFFECT OF METASTABLE ATOM REACTIONS ON THE ELECTRON-ENERGY PROBABILITY FUNCTIONS IN AFTERGLOWS
Plasma sources science & technology (Print)