Per ulteriori informazioni selezionare i riferimenti di interesse.
Distorted silicon hydrides - A comparative study with various density functionals
JOURNAL OF COMPUTATIONAL CHEMISTRY
Status of Cat-CVD (Hot-Wire CVD) research in Europe
THIN SOLID FILMS
Identification and gas phase kinetics of radical species in Cat-CVD processes of SiH4
THIN SOLID FILMS
Hot-wire produced atomic hydrogen: effects during and after amorphous-silicon deposition
THIN SOLID FILMS
Is the nucleation and coalescence behavior in the growth of a-Si : H filmsprepared by the CAT-CVD different?
THIN SOLID FILMS
Highly conducting doped microcrystalline silicon (mu c-Si : H) at very lowsubstrate temperature by Cat-CVD
THIN SOLID FILMS
Application of hot-wire chemical vapor-deposited Si : H films in thin filmtransistors and solar cells
THIN SOLID FILMS
The effects of hot-wire atomic hydrogen on amorphous silicon
JOURNAL OF APPLIED PHYSICS
Hydrogenated amorphous silicon deposited at very high growth rates by an expanding Ar-H-2-SiH4 plasma
JOURNAL OF APPLIED PHYSICS
Development and qualification of a vacuum pumping system for metalorganic vapor phase epitaxy copper precursors
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Preparation of thin copper films from the vapour phase of volatile copper(I) and copper(II) derivatives by the CVD method
USPEKHI KHIMII
Anisotropy in the transport of microcrystalline silicon
JOURNAL OF NON-CRYSTALLINE SOLIDS
Metastability of hot-wire amorphous-silicon thin-film transistors
JOURNAL OF NON-CRYSTALLINE SOLIDS
Identification of Si and SiH in catalytic chemical vapor deposition of SiH4 by laser induced fluorescence spectroscopy
JOURNAL OF APPLIED PHYSICS
Si-H bonding in low hydrogen content amorphous silicon films as probed by infrared spectroscopy and x-ray diffraction
JOURNAL OF APPLIED PHYSICS
Features of hydrogenated amorphous silicon films developed under an unexplored region of parameter space of radio-frequency plasma-enhanced chemical vapor deposition
APPLIED PHYSICS LETTERS
Synthesis and characterization of device-quality B-doped homoepitaxial diamond films
NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY
Effect of post-deposition treatments on the hydrogenation of hot-wire deposited amorphous silicon films
PROGRESS IN PHOTOVOLTAICS
Plasma-enhanced metal organic chemical vapor deposition of high purity copper thin films using plasma reactor with the H atom source
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
A novel model of hydrogen plasma assisted chemical vapor deposition of copper
THIN SOLID FILMS
Conformal deposition of high-purity copper using plasma reactor with H atom source
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
REDUCTION OF TIN OXIDE BY HYDROGEN RADICALS
JOURNAL OF PHYSICAL CHEMISTRY B
EXPERIMENTS ON THE PLASMA-ASSISTED CHEMICAL-VAPOR-DEPOSITION OF COPPER
Journal of vacuum science & technology. A. Vacuum, surfaces, and films
STRUCTURE AND HYDROGEN CONTENT OF STABLE HOT-WIRE-DEPOSITED AMORPHOUS-SILICON
Applied physics letters
CHARACTERISTIC STRUCTURAL FEATURES OF AMORPHOUS HYDRATED SILICON FILMS DEPOSITED BY DIRECT-CURRENT DECOMPOSITION OF SILANE IN A MAGNETIC-FIELD
Semiconductors
REDUCTION OF LIGHT-INDUCED METASTABLE CHANGES IN A-SIGE-H PREPARED BYUSING HELIUM DILUTION - COMPARISON OF METASTABILITY OF HELIUM-DILUTEDAND HYDROGEN-DILUTED A-SIGE-H ALLOYS
Journal of physics. D, Applied physics
MECHANISMS INFLUENCING HOT-WIRE DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON
Journal of applied physics
COMPARATIVE-STUDY OF PROPERTIES OF A-SI-H FILMS PRODUCED BY HOT-FILAMENT CVD, GLOW-DISCHARGE CVD AND THEIR HYBRID VERSION
Thin solid films
ROLE OF SI-H BONDING IN A-SI-H METASTABILITY
Journal of applied physics
MECHANISTIC ROLE OF H2O AND THE LIGAND IN THE CHEMICAL-VAPOR-DEPOSITION OF CU, CU2O, CUO, AND CU3N FROM 1,1,5,5,5-HEXAFLUOROPENTANE-2,4-DIONATO)COPPER(II)
Chemistry of materials
IN-SITU QUADRUPOLE MASS-SPECTROSCOPY STUDIES OF WATER AND SOLVENT COORDINATION TO COPPER(II) BETA-DIKETONATE PRECURSORS - IMPLICATIONS FOR THE CHEMICAL-VAPOR-DEPOSITION OF COPPER
Materials chemistry and physics
HYDROGENATED AMORPHOUS-SILICON FILMS PREPARED AT LOW SUBSTRATE-TEMPERATURE ON A CATHODE OF AN ASYMMETRIC RF PLASMA CVD SYSTEM
Thin solid films
ATOMIC LAYER EPITAXY DEPOSITION PROCESSES
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
SELECTIVE-AREA AND SIDEWALL GROWTH BY ATOMIC LAYER EPITAXY
Semiconductor science and technology
ROLE OF SOLVENTS IN CHEMICAL-VAPOR-DEPOSITION - IMPLICATIONS FOR COPPER THIN-FILM GROWTH
Journal of physical chemistry
REAL-TIME, IN-SITU MONITORING OF ROOM-TEMPERATURE SILICON SURFACE CLEANING USING HYDROGEN AND AMMONIA PLASMAS
Journal of the Electrochemical Society