Catalogo Articoli (Spogli Riviste)

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La ricerca find articoli where soggetti phrase all words 'BINARY REACTION SEQUENCE' sort by level,fasc_key/DESCEND, pagina_ini_num/ASCEND ha restituito 22 riferimenti
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    1. Puurunen, RL; Lindblad, M; Root, A; Krause, AOI
      Successive reactions of gaseous trimethylaluminium and ammonia on porous alumina

      PHYSICAL CHEMISTRY CHEMICAL PHYSICS
    2. Rahtu, A; Kukli, K; Ritala, M
      In situ mass spectrometry study on atomic layer deposition from metal (Ti,Ta, and Nb) ethoxides and water

      CHEMISTRY OF MATERIALS
    3. Rahtu, A; Alaranta, T; Ritala, M
      In situ quartz crystal microbalance and quadrupole mass spectrometry studies of atomic layer deposition of aluminum oxide from trimethylaluminum and water

      LANGMUIR
    4. Elam, JW; Nelson, CE; Grubbs, RK; George, SM
      Kinetics of the WF6 and Si2H6 surface reactions during tungsten atomic layer deposition

      SURFACE SCIENCE
    5. Ferguson, JD; Weimer, AW; George, SM
      Atomic layer deposition of SiO2 films on BN particles using sequential surface reactions

      CHEMISTRY OF MATERIALS
    6. Juppo, M; Rahtu, A; Ritala, M; Leskela, M
      In situ mass spectrometry study on, surface reactions in atomic layer deposition of Al2O3 thin films from trimethylaluminum and water

      LANGMUIR
    7. Cameron, MA; Gartland, IP; Smith, JA; Diaz, SF; George, SM
      Atomic layer deposition of SiO2 and TiO2 in alumina tubular membranes: Pore reduction and effect of surface species on gas transport

      LANGMUIR
    8. Ferguson, JD; Weimer, AW; George, SM
      Atomic layer deposition of Al2O3 and SiO2 on BN particles using sequentialsurface reactions

      APPLIED SURFACE SCIENCE
    9. Klaus, JW; Ferro, SJ; George, SM
      Atomically controlled growth of tungsten and tungsten nitride using sequential surface reactions

      APPLIED SURFACE SCIENCE
    10. Ferguson, JD; Weimer, AW; George, SM
      Atomic layer deposition of ultrathin and conformal Al2O3 films on BN particles

      THIN SOLID FILMS
    11. Matero, R; Rahtu, A; Ritala, M; Leskela, M; Sajavaara, T
      Effect of water dose on the atomic layer deposition rate of oxide thin films

      THIN SOLID FILMS
    12. Klaus, JW; Ferro, SJ; George, SM
      Atomic layer deposition of tungsten using sequential surface chemistry with a sacrificial stripping reaction

      THIN SOLID FILMS
    13. Klaus, JW; George, SM
      Atomic layer deposition of SiO2 at room temperature using NH3-catalyzed sequential surface reactions

      SURFACE SCIENCE
    14. Klaus, JW; Ferro, SJ; George, SM
      Atomic layer deposition of tungsten nitride films using sequential surfacereactions

      JOURNAL OF THE ELECTROCHEMICAL SOCIETY
    15. Okamoto, Y
      Initial stage of the catalyzed growth of SiO2 films on Si(001): An ab initio study

      JOURNAL OF PHYSICAL CHEMISTRY B
    16. Leskela, M; Ritala, M
      ALD precursor chemistry: Evolution and future challenges

      JOURNAL DE PHYSIQUE IV
    17. Ritala, M; Juppo, M; Kukli, K; Rahtu, A; Leskela, M
      In situ characterization of atomic layer deposition processes by a mass spectrometer

      JOURNAL DE PHYSIQUE IV
    18. Ritala, M; Leskela, M
      Atomic layer epitaxy - a valuable tool for nanotechnology?

      NANOTECHNOLOGY
    19. Nitodas, SF; Sotirchos, SV
      Co-deposition of silica, alumina, and aluminosilicates hom mixtures of CH3SiCl3, AlCl3, CO2, and H-2. Thermodynamic analysis and experimental kinetics investigation

      CHEMICAL VAPOR DEPOSITION
    20. Klaus, JW; Sneh, O; Ott, AW; George, SM
      Atomic layer deposition of SiO2 using catalyzed and uncatalyzed self-limiting surface reactions

      SURFACE REVIEW AND LETTERS
    21. Okada, LA; George, SM
      Adsorption and desorption kinetics of tetrakis(dimethylamino)titanium and dimethylamine on TiN surfaces

      APPLIED SURFACE SCIENCE
    22. Berland, BS; Gartland, IP; Ott, AW; George, SM
      In situ monitoring of atomic layer controlled pore reduction in alumina tubular membranes using sequential surface reactions

      CHEMISTRY OF MATERIALS


ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 22/10/20 alle ore 06:31:37