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Mechanical deformation in silicon by micro-indentation
JOURNAL OF MATERIALS RESEARCH
Defect formation due to the crystallization of deep amorphous volumes formed in silicon by mega electron volt (MeV) ion implantation
JOURNAL OF MATERIALS RESEARCH
Interaction of defects and metals with nanocavities in silicon
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Efficiency of dislocations and cavities for gettering of Cu and Fe in silicon
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
The crystallisation of deep amorphous wells in silicon produced by ion implantation
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Effect of implant temperature on secondary defects created by MeV Sn implantation in silicon
JOURNAL OF APPLIED PHYSICS
Capture cross sections of the acceptor level of iron-boron pairs in p-typesilicon by injection-level dependent lifetime measurements
JOURNAL OF APPLIED PHYSICS
Solubility limit and precipitate formation in Al-doped 4H-SiC epitaxial material
APPLIED PHYSICS LETTERS
Separation of vacancy and interstitial depth profiles in ion-implanted silicon: Experimental observation
APPLIED PHYSICS LETTERS
Mechanical deformation of InP and GaAs by spherical indentation
APPLIED PHYSICS LETTERS
Direct observation of voids in the vacancy excess region of ion bombarded silicon
APPLIED PHYSICS LETTERS
Selectivity of nanocavities and dislocations for gettering of Cu and Fe insilicon
APPLIED PHYSICS LETTERS
Effect of implant temperature on extended defects created by ion implantation in silicon
DEFECTS AND DIFFUSION IN SEMICONDUCTORS
Transmission electron microscopy characterization of secondary defects created by MeV Si, Ge, and Sn implantation in silicon
JOURNAL OF APPLIED PHYSICS
Transmission electron microscopy observation of deformation microstructureunder spherical indentation in silicon
APPLIED PHYSICS LETTERS
Ultra-micro-indentation of silicon and compound semiconductors with spherical indenters
JOURNAL OF MATERIALS RESEARCH
The role of Fe on the crystallisation of alpha-Si3N4 from amorphous Si-N formed by ion implantation
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Diffusion and transient trapping of metals in silicon
PHYSICAL REVIEW B-CONDENSED MATTER
The role of oxygen on the stability of gettering of metals to cavities in silicon
APPLIED PHYSICS LETTERS
Effect of ion mass on the evolution of extended defects during annealing of MeV ion-implanted p-type Si
APPLIED PHYSICS LETTERS