Catalogo Articoli (Spogli Riviste)

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La ricerca find articoli where authors phrase all words ' Shikida, M' sort by level,fasc_key/DESCEND, pagina_ini_num/ASCEND ha restituito 18 riferimenti
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    1. van Veenendaal, E; Sato, K; Shikida, M; van Suchtelen, J
      Micromorphology of single crystalline silicon surfaces during anisotropic wet chemical etching in KOH and TMAH

      SENSORS AND ACTUATORS A-PHYSICAL
    2. van Veenendaal, E; Sato, K; Shikida, M; Nijdam, AJ; van Suchtelen, J
      Micro-morphology of single crystalline silicon surfaces during anisotropicwet chemical etching in KOH: velocity source forests

      SENSORS AND ACTUATORS A-PHYSICAL
    3. Ando, T; Shikida, M; Sato, K
      Tensile-mode fatigue testing of silicon films as structural materials for MEMS

      SENSORS AND ACTUATORS A-PHYSICAL
    4. Kutchoukov, VG; Mollinger, JR; Shikida, M; Bossche, A
      Patterning of polyimide and metal in deep trenches

      SENSORS AND ACTUATORS A-PHYSICAL
    5. Shikida, M; Masuda, T; Uchikawa, D; Sato, K
      Surface roughness of single-crystal silicon etched by TMAH solution

      SENSORS AND ACTUATORS A-PHYSICAL
    6. Mitsuoka, Y; Niwa, T; Ichihara, S; Kato, K; Muramatsu, H; Nakajima, K; Shikida, M; Sato, K
      Microfabricated silicon dioxide cantilever with subwavelength aperture

      JOURNAL OF MICROSCOPY-OXFORD
    7. Sato, K; Asaumi, K; Kobayashi, G; Iriye, Y; Shikida, M
      Development of an orientation-dependent anisotropic etching simulation system MICROCAD

      ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS
    8. Shikida, M; Tokoro, K; Uchikawa, D; Sato, K
      Surface morphology of anisotropically etched single-crystal silicon

      JOURNAL OF MICROMECHANICS AND MICROENGINEERING
    9. Yoshioka, T; Ando, T; Shikida, M; Sato, K
      Tensile testing of SiO2 and Si3N4 films carried out on a silicon chip

      SENSORS AND ACTUATORS A-PHYSICAL
    10. Shikida, M; Sato, K; Tokoro, K; Uchikawa, D
      Differences in anisotropic etching properties of KOH and TMAH solutions

      SENSORS AND ACTUATORS A-PHYSICAL
    11. Sato, K; Shikida, M; Yamashiro, T; Tsunekawa, M; Ito, S
      Roughening of single-crystal silicon surface etched by KOH water solution

      SENSORS AND ACTUATORS A-PHYSICAL
    12. Sato, K; Shikida, M; Yamashiro, T; Asaumi, K; Iriye, Y; Yamamoto, M
      Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation

      SENSORS AND ACTUATORS A-PHYSICAL
    13. SATO K; YOSHIOKA T; ANDO T; SHIKIDA M; KAWABATA T
      TENSILE TESTING OF SILICON FILM HAVING DIFFERENT CRYSTALLOGRAPHIC ORIENTATIONS CARRIED OUT ON A SILICON CHIP

      Sensors and actuators. A, Physical
    14. SATO K; SHIKIDA M; MATSUSHIMA Y; YAMASHIRO T; ASAUMI K; IRIYE Y; YAMAMOTO M
      CHARACTERIZATION OF ORIENTATION-DEPENDENT ETCHING PROPERTIES OF SINGLE-CRYSTAL SILICON - EFFECTS OF KOH CONCENTRATION

      Sensors and actuators. A, Physical
    15. SHIKIDA M; SATO K; HARADA T
      FABRICATION OF AN S-SHAPED MICROACTUATOR

      Journal of microelectromechanical systems
    16. SHIKIDA M; SAKANE M; OHNAMI M
      FATIGUE-CRACK PROPAGATION FOR CAST-IRON ROTATING-DISK

      JSME international journal. Series A, mechanics and material engineering
    17. SAKATA S; SHIKIDA M
      MULTIMEDIA COMMUNICATION SERVICES AND FIBER OPTIC TECHNOLOGIES

      Optoelectronics
    18. SATO K; SHIKIDA M
      AN ELECTROSTATICALLY ACTUATED GAS VALVE WITH AN S-SHAPED FILM ELEMENT

      Journal of micromechanics and microengineering


ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 06/06/20 alle ore 17:46:42