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    1. Kuiper, S; van Rijn, C; Nijdam, W; Raspe, O; van Wolferen, H; Krijnen, G; Elwenspoek, M
      Filtration of lager beer with microsieves: flux, permeate haze and in-linemicroscope observations

      JOURNAL OF MEMBRANE SCIENCE
    2. Rusu, C; van't Oever, R; de Boer, MJ; Jansen, HV; Berenschot, JW; Bennink, ML; Kanger, JS; de Grooth, BG; Elwenspoek, M; Greve, J; Brugger, J; van den Berg, A
      Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers

      JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
    3. Blom, MT; Tas, NR; Pandraud, G; Chmela, E; Gardeniers, JGE; Tijssen, R; Elwenspoek, M; van den Berg, A
      Failure mechanisms of pressurized microchannels, model, and experiments

      JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
    4. Nijdam, AJ; Gardeniers, JGE; Berenschot, JW; van Veenendaal, E; van Suchtelen, J; Elwenspoek, M
      Influence of the angle between etched (near) Si{111} surfaces and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of silicon

      JOURNAL OF MICROMECHANICS AND MICROENGINEERING
    5. van Baar, JJ; Wiegerink, RJ; Lammerink, TSJ; Krijnen, GJM; Elwenspoek, M
      Micromachined structures for thermal measurements of fluid and flow parameters

      JOURNAL OF MICROMECHANICS AND MICROENGINEERING
    6. Blom, MT; Chmela, E; Gardeniers, JGE; Berenschot, JW; Elwenspoek, M; Tijssen, R; van den Berg, A
      Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connections

      JOURNAL OF MICROMECHANICS AND MICROENGINEERING
    7. Schlautmann, S; Wensink, H; Schasfoort, R; Elwenspoek, M; van den Berg, A
      Powder-blasting technology as an alternative tool for microfabrication of capillary electrophoresis chips with integrated conductivity sensors

      JOURNAL OF MICROMECHANICS AND MICROENGINEERING
    8. van Veenendaal, E; Cuppen, HM; van Enckevort, WJP; van Suchtelen, J; Nijdam, AJ; Elwenspoek, M; Vlieg, E
      A Monte Carlo study of etching in the presence of a mask junction

      JOURNAL OF MICROMECHANICS AND MICROENGINEERING
    9. Kuiper, S; van Wolferen, H; van Rijn, G; Nijdam, W; Krijnen, G; Elwenspoek, M
      Fabrication of microsieves with sub-micron pore size by laser interferencelithography

      JOURNAL OF MICROMECHANICS AND MICROENGINEERING
    10. Jansen, H; de Boer, M; Wensink, H; Kloeck, B; Elwenspoek, M
      The black silicon method. VIII. A study of the performance of etching silicon using SF6/O-2-based chemistry with cryogenical wafer cooling and a highdensity ICP source

      MICROELECTRONICS JOURNAL
    11. Nijdam, AJ; van Veenendaal, E; Cuppen, HM; van Suchtelen, J; Reed, ML; Gardeniers, JGE; van Enckevort, WJP; Vlieg, E; Elwenspoek, M
      Formation and stabilization of pyramidal etch hillocks on silicon {100} inanisotropic etchants: Experiments and Monte Carlo simulation

      JOURNAL OF APPLIED PHYSICS
    12. de Boer, MJ; Tjerkstra, RW; Berenschot, JW; Jansen, HV; Burger, CJ; Gardeniers, JGE; Elwenspoek, M; van den Berg, A
      Micromachining of buried micro channels in silicon

      JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
    13. Kuiper, S; de Boer, M; van Rijn, C; Nijdam, W; Krijnen, G; Elwenspoek, M
      Wet and dry etching techniques for the release of sub-micrometre perforated membranes

      JOURNAL OF MICROMECHANICS AND MICROENGINEERING
    14. Zwijze, RAF; Wiegerink, RJ; Krijnen, GJM; Lammerink, TSJ; Elwenspoek, M
      Low-cost piezoresistive silicon load cell independent of force distribution

      JOURNAL OF MICROMECHANICS AND MICROENGINEERING
    15. van Honschoten, J; van Baar, J; de Bree, HE; Lammerink, T; Krijnen, G; Elwenspoek, M
      Application of a microflown as a low-cost level sensor

      JOURNAL OF MICROMECHANICS AND MICROENGINEERING
    16. Neagu, C; Jansen, H; Gardeniers, H; Elwenspoek, M
      The electrolysis of water: an actuation principle for MEMS with a big opportunity

      MECHATRONICS
    17. Nijdam, AJ; Gardeniers, JGE; Gui, C; Elwenspoek, M
      Etching pits and dislocations in Si{111}

      SENSORS AND ACTUATORS A-PHYSICAL
    18. van Veenendaal, E; Nijdam, AJ; van Suchtelen, J; Sato, K; Gardeniers, JGE; van Enckevort, WJP; Elwenspoek, M
      Simulation of anisotropic wet chemical etching using a physical model

      SENSORS AND ACTUATORS A-PHYSICAL
    19. Wiegerink, R; Zwijze, R; Krijnen, G; Lammerink, T; Elwenspoek, M
      Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions

      SENSORS AND ACTUATORS A-PHYSICAL
    20. Brugger, J; Berenschot, JW; Kuiper, S; Nijdam, W; Otter, B; Elwenspoek, M
      Resistless patterning of sub-micron structures by evaporation through nanostencils

      MICROELECTRONIC ENGINEERING
    21. van Veenendaal, E; van Beurden, P; van Enckevort, WJP; Vlieg, E; van Suchtelen, J; Elwenspoek, M
      Monte Carlo study of kinetic smoothing during dissolution and etching of the Kossel (100) and silicon (111) surfaces

      JOURNAL OF APPLIED PHYSICS
    22. van Veenendaal, E; van Suchtelen, J; van Enckevort, WJP; Sato, K; Nijdam, AJ; Gardeniers, JGE; Elwenspoek, M
      The construction of orientation-dependent crystal growth and etch rate functions II: Application to wet chemical etching of silicon in potassium hydroxide

      JOURNAL OF APPLIED PHYSICS
    23. Nijdam, AJ; van Veenendaal, E; Gardeniers, JGE; Kentgens, APM; Nachtegaal, GH; Elwenspoek, M
      Si-29-nuclear magnetic resonance on the etching products of silicon in potassium hydroxide solutions

      JOURNAL OF THE ELECTROCHEMICAL SOCIETY
    24. de Nivelle, MJME; Bruijn, MP; de Korte, PAJ; Sanchez, S; Elwenspoek, M; Heidenblut, T; Schwierzi, B; Michalke, W; Steinbeiss, E
      High-T-c bolometers with silicon-nitride spiderweb suspension for far-infrared detection

      IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
    25. Nijdam, AJ; Berenschot, JW; van Suchtelen, J; Gardeniers, JGE; Elwenspoek, M
      Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates

      JOURNAL OF MICROMECHANICS AND MICROENGINEERING
    26. van Rijn, CJM; Nijdam, W; Kulper, S; Veldhuis, GJ; van Wolferen, H; Elwenspoek, M
      Microsieves made with laser interference lithography for micro-filtration applications

      JOURNAL OF MICROMECHANICS AND MICROENGINEERING
    27. Elwenspoek, M
      Stationary hillocks on etching silicon

      JOURNAL OF MICROMECHANICS AND MICROENGINEERING
    28. de Bree, HE; Jansen, HV; Lammerink, TSJ; Krijnen, GJM; Elwenspoek, M
      Bi-directional fast flow sensor with a large dynamic range

      JOURNAL OF MICROMECHANICS AND MICROENGINEERING
    29. Krijnen, GJM; Lammerink, TSJ; Lambeck, PV; Elwenspoek, M
      Optical devices based on fluidic controlled two-mode interference

      JOURNAL OF MICROMECHANICS AND MICROENGINEERING
    30. Gui, C; Veldhuis, GJ; Koster, TM; Lambeck, PV; Berenschot, JW; Gardeniers, JGE; Elwenspoek, M
      Fabrication of nanomechanical optical devices with aligned wafer bonding

      MICROSYSTEM TECHNOLOGIES
    31. Zwijze, RAF; Wiegerink, RJ; Krijnen, GJM; Lammerink, TSJ; Elwenspoek, M
      Low creep and hysteresis load cell based on a force-to-fluid pressure transformation

      SENSORS AND ACTUATORS A-PHYSICAL
    32. Nijdam, AJ; van Suchtelen, J; Berenschot, JW; Gardeniers, JGE; Elwenspoek, M
      Etching of silicon in alkaline solutions: a critical look at the {1 1 1} minimum

      JOURNAL OF CRYSTAL GROWTH
    33. Gui, C; Elwenspoek, M; Tas, N; Gardeniers, JGE
      The effect of surface roughness on direct wafer bonding

      JOURNAL OF APPLIED PHYSICS
    34. SANCHEZ S; ELWENSPOEK M; GUI CQ; DENIVELLE MJME; DEVRIES R; DEKORTE PAJ; BRUIJN MP; WIJNBERGEN JJ; MICHALKE W; STEINBEISS E; HEIDENBLUT T; SCHWIERZI B
      A HIGH-T-C SUPERCONDUCTOR BOLOMETER ON A SILICON-NITRIDE MEMBRANE

      Journal of microelectromechanical systems
    35. LEGTENBERG R; BERENSCHOT E; VANBAAR J; ELWENSPOEK M
      AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART 1 - DESIGN AND MODELING

      Journal of microelectromechanical systems
    36. LEGTENBERG R; BERENSCHOT E; VANBAAR J; ELWENSPOEK M
      AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART II - FABRICATION AND PERFORMANCE

      Journal of microelectromechanical systems
    37. GUI CQ; LEGTENBERG R; TILMANS HAC; FLUITMAN JHJ; ELWENSPOEK M
      NONLINEARITY AND HYSTERESIS OF RESONANT STRAIN-GAUGES

      Journal of microelectromechanical systems
    38. BURGER J; BERENSCHOT E; BURGER GJ; VISSCHER H; ELWENSPOEK M
      PIEZORESISTIVE FRICTION FORCE SENSOR FOR TRIBOLOGICAL RESEARCH

      Journal of micromechanics and microengineering
    39. GUI C; DEBOER M; GARDENIERS JGE; JANSEN H; BERENSCHOT JW; ELWENSPOEK M
      FABRICATION OF MULTILAYER SUBSTRATES FOR HIGH-ASPECT-RATIO SINGLE-CRYSTALLINE MICROSTRUCTURES

      Sensors and actuators. A, Physical
    40. TAS N; WISSINK J; SANDER L; LAMMERINK T; ELWENSPOEK M
      MODELING, DESIGN AND TESTING OF THE ELECTROSTATIC SHUFFLE MOTOR

      Sensors and actuators. A, Physical
    41. GARDENIERS JGE; VERHOLEN AGBJ; TAS NR; ELWENSPOEK M
      DIRECT MEASUREMENT OF PIEZOELECTRIC PROPERTIES OF SOL-GEL PZT FILMS

      Journal of the Korean Physical Society
    42. VELDHUIS GJ; GUI C; NAUTA T; KOSTER TM; BERENSCHOT JW; LAMBECK PV; GARDENIERS JGE; ELWENSPOEK M
      MECHANO-OPTICAL WAVE-GUIDE ON-OFF INTENSITY MODULATOR

      Optics letters
    43. DENBRABER ET; JANSEN HV; DEBOER MJ; CROES HJE; ELWENSPOEK M; GINSEL LA; JANSEN JA
      SCANNING ELECTRON-MICROSCOPIC, TRANSMISSION ELECTRON-MICROSCOPIC, ANDCONFOCAL LASER-SCANNING MICROSCOPIC OBSERVATION OF FIBROBLASTS CULTURED ON MICROGROOVED SURFACES OF BULK TITANIUM SUBSTRATA

      Journal of biomedical materials research
    44. GUI C; ELWENSPOEK M; GARDENIERS JGE; LAMBECK PV
      PRESENT AND FUTURE-ROLE OF CHEMICAL-MECHANICAL POLISHING IN WAFER BONDING

      Journal of the Electrochemical Society
    45. LEGTENBERG R; BERENSCHOT E; ELWENSPOEK M; FLUITMAN JH
      A FABRICATION PROCESS FOR ELECTROSTATIC MICROACTUATORS WITH INTEGRATED GEAR LINKAGES

      Journal of microelectromechanical systems
    46. LEGTENBERG R; GILBERT J; SENTURIA SD; ELWENSPOEK M
      ELECTROSTATIC CURVED ELECTRODE ACTUATORS

      Journal of microelectromechanical systems
    47. VANRIJN C; VANDERWEKKEN M; NIJDAM W; ELWENSPOEK M
      DEFLECTION AND MAXIMUM LOAD OF MICROFILTRATION MEMBRANE SIEVES MADE WITH SILICON MICROMACHINING

      Journal of microelectromechanical systems
    48. SANCHEZ S; GUI C; ELWENSPOEK M
      SPONTANEOUS DIRECT BONDING OF THICK SILICON-NITRIDE

      Journal of micromechanics and microengineering
    49. VANTOOR MW; LAMMERINK TSJ; GARDENIERS JGE; ELWENSPOEK M; MONSMA D
      A NOVEL MICROMECHANICAL FLOW CONTROLLER

      Journal of micromechanics and microengineering
    50. GUI C; ALBERS H; GARDENIERS JGE; ELWENSPOEK M; LAMBECK PV
      FUSION BONDING OF ROUGH SURFACES WITH POLISHING TECHNIQUE FOR SILICONMICROMACHINING

      Microsystem technologies
    51. JANSEN H; DEBOER M; WIEGERINK R; TAS N; SMULDERS E; NEAGU C; ELWENSPOEK M
      RIE LAG IN HIGH-ASPECT-RATIO TRENCH ETCHING OF SILICON

      Microelectronic engineering
    52. KASPARIAN J; ELWENSPOEK M; ALLONGUE P
      DIGITAL COMPUTATION AND IN-SITU STM APPROACH OF SILICON ANISOTROPIC ETCHING

      Surface science
    53. DENIVELLE MJME; BRUIJN MP; DEVRIES R; WIJNBERGEN JJ; DEKORTE PAJ; SANCHEZ S; ELWENSPOEK M; HEIDENBLUT T; SCHWIERZI B; MICHALKE W; STEINBEISS E
      LOW-NOISE HIGH-T-C SUPERCONDUCTING BOLOMETERS ON SILICON-NITRIDE MEMBRANES FOR FAR-INFRARED DETECTION

      Journal of applied physics
    54. NEAGU CR; GARDENIERS JGE; ELWENSPOEK M; KELLY JJ
      AN ELECTROCHEMICAL ACTIVE VALVE

      Electrochimica acta
    55. DENIVELLE MJME; BRUIJN MP; FRERICKS M; DEVRIES R; WIJNBERGEN JJ; DEKORTE PAJ; SANCHEZ S; ELWENSPOEK M; HEIDENBLUT T; SCHWIERZI B; MICHALKE W; STEINBEISS E
      A HIGH-T-C SUPERCONDUCTOR BOLOMETER FOR REMOTE-SENSING OF ATMOSPHERICOH

      Journal de physique. IV
    56. NEAGU CR; GARDENIERS JGE; ELWENSPOEK M; KELLY JJ
      AN ELECTROCHEMICAL MICROACTUATOR - PRINCIPLE AND FIRST RESULTS

      Journal of microelectromechanical systems
    57. TAS N; SONNENBERG T; JANSEN H; LEGTENBERG R; ELWENSPOEK M
      STICTION IN SURFACE MICROMACHINING

      Journal of micromechanics and microengineering
    58. ELWENSPOEK M
      THE FORM OF ETCH RATE MINIMA IN WET CHEMICAL ANISOTROPIC ETCHING OF SILICON

      Journal of micromechanics and microengineering
    59. LEGTENBERG R; GROENEVELD AW; ELWENSPOEK M
      COMB-DRIVE ACTUATORS FOR LARGE DISPLACEMENTS

      Journal of micromechanics and microengineering
    60. JANSEN H; GARDENIERS H; DEBOER M; ELWENSPOEK M; FLUITMAN J
      A SURVEY ON THE REACTIVE ION ETCHING OF SILICON IN MICROTECHNOLOGY

      Journal of micromechanics and microengineering
    61. DEBREE HE; LEUSSINK P; KORTHURST T; JANSEN H; LAMMERINK TSJ; ELWENSPOEK M
      THE MU-FLOWN - A NOVEL DEVICE FOR MEASURING ACOUSTIC FLOWS

      Sensors and actuators. A, Physical
    62. BRESSERS PMMC; KELLY JJ; GARDENIERS JGE; ELWENSPOEK M
      SURFACE-MORPHOLOGY OF P-TYPE (100)SILICON ETCHED IN AQUEOUS ALKALINE-SOLUTION

      Journal of the Electrochemical Society
    63. SPIERING VL; BERENSCHOT JW; ELWENSPOEK M; FLUITMAN JHJ
      SACRIFICIAL WAFER BONDING FOR PLANARIZATION AFTER VERY DEEP-ETCHING

      Journal of microelectromechanical systems
    64. JANSEN H; DEBOER M; LEGTENBERG R; ELWENSPOEK M
      THE BLACK SILICON METHOD - A UNIVERSAL METHOD FOR DETERMINING THE PARAMETER SETTING OF A FLUORINE-BASED REACTIVE ION ETCHER IN DEEP SILICONTRENCH ETCHING WITH PROFILE CONTROL

      Journal of micromechanics and microengineering
    65. GUI CQ; LEGTENBERG R; ELWENSPOEK M; FLUITMAN JH
      Q-FACTOR DEPENDENCE OF ONE-PORT ENCAPSULATED POLYSILICON RESONATOR ONREACTIVE SEALING PRESSURE

      Journal of micromechanics and microengineering
    66. SPIERING VL; BERENSCHOT JW; ELWENSPOEK M
      PLANARIZATION AND FABRICATION OF BRIDGES ACROSS DEEP GROOVES OR HOLESIN SILICON USING A DRY FILM PHOTORESIST FOLLOWED BY AN ETCH BACK

      Journal of micromechanics and microengineering
    67. VANKUIJK J; LAMMERINK TSJ; DEBREE HE; ELWENSPOEK M; FLUITMAN JHJ
      MULTIPARAMETER DETECTION IN FLUID-FLOWS

      Sensors and actuators. A, Physical
    68. JANSEN H; DEBOER M; BURGER J; LEGTENBERG R; ELWENSPOEK M
      THE BLACK SILICON METHOD .2. THE EFFECT OF MASK MATERIAL AND LOADING ON THE REACTIVE ION ETCHING OF DEEP SILICON TRENCHES

      Microelectronic engineering
    69. LEGTENBERG R; JANSEN H; DEBOER M; ELWENSPOEK M
      ANISOTROPIC REACTIVE ION ETCHING OF SILICON USING SF6 O-2/CHF3 GAS MIXTURES/

      Journal of the Electrochemical Society
    70. ELWENSPOEK M; LAMMERINK TSJ; MIYAKE R; FLUITMAN JHJ
      TOWARDS INTEGRATED MICROLIQUID HANDLING SYSTEMS

      Journal of micromechanics and microengineering
    71. LEGTENBERG R; TILMANS HAC; ELDERS J; ELWENSPOEK M
      STICTION OF SURFACE MICROMACHINED STRUCTURES AFTER RINSING AND DRYING- MODEL AND INVESTIGATION OF ADHESION MECHANISMS

      Sensors and actuators. A, Physical
    72. JANSEN HV; GARDENIERS JGE; ELDERS J; TILMANS HAC; ELWENSPOEK M
      APPLICATIONS OF FLUOROCARBON POLYMERS IN MICROMECHANICS AND MICROMACHINING

      Sensors and actuators. A, Physical
    73. BERENSCHOT JW; GARDENIERS JGE; LAMMERINK TSJ; ELWENSPOEK M
      NEW APPLICATIONS OF RF-SPUTTERED GLASS-FILMS AS PROTECTION AND BONDING LAYERS IN SILICON MICROMACHINING

      Sensors and actuators. A, Physical
    74. TILMANS HAC; LEGTENBERG R; SCHURER H; IJNTEMA DJ; ELWENSPOEK M; FLUITMAN JHJ
      (ELECTRO)MECHANICAL CHARACTERISTICS OF ELECTROSTATICALLY DRIVEN VACUUM ENCAPSULATED POLYSILICON RESONATORS

      IEEE transactions on ultrasonics, ferroelectrics, and frequency control
    75. ELWENSPOEK M; LAMMERINK TSJ; MIYAKE R; FLUITMAN JHJ
      SILICON MICROSTRUCTURES FOR FLUID HANDLING

      Analusis
    76. LAMMERINK TSJ; TAS NR; ELWENSPOEK M; FLUITMAN JHJ
      MICRO-LIQUID FLOW SENSOR

      Sensors and actuators. A, Physical
    77. ELWENSPOEK M
      ON THE MECHANISM OF ANISOTROPIC ETCHING OF SILICON

      Journal of the Electrochemical Society


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Documento generato il 12/08/20 alle ore 17:50:21