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Titolo:
FABRICATION OF DIAMOND TIPS BY THE MICROWAVE PLASMA CHEMICAL-VAPOR-DEPOSITION TECHNIQUE
Autore:
LIU N; MA Z; CHU X; HU T; XUE Z; JIANG X; PANG S;
Indirizzi:
CHINESE ACAD SCI,BEIJING LAB VACUUM PHYS,POB 2724 BEIJING 100080 PEOPLES R CHINA BEIJING UNIV,DEPT RADIO ELECTR BEIJING 100871 PEOPLES R CHINA CHINESE ACAD SCI,BEIJING RES & DEV CTR SCI INSTRUMENTS BEIJING 100080PEOPLES R CHINA
Titolo Testata:
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
fascicolo: 3, volume: 12, anno: 1994,
pagine: 1712 - 1715
SICI:
1071-1023(1994)12:3<1712:FODTBT>2.0.ZU;2-0
Fonte:
ISI
Lingua:
ENG
Soggetto:
SCANNING TUNNELING MICROSCOPY; GAS-PHASE; SURFACE; GROWTH;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
16
Recensione:
Indirizzi per estratti:
Citazione:
N. Liu et al., "FABRICATION OF DIAMOND TIPS BY THE MICROWAVE PLASMA CHEMICAL-VAPOR-DEPOSITION TECHNIQUE", Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(3), 1994, pp. 1712-1715

Abstract

Scanning tunneling electron microscopy (STM) has recently shown greatpromise for surface modification in the nanometer regime. As is well known, the normal STM tips are easily damaged by mechanical contact with the sample surface in most cases. In this paper we describe a new type of diamond STM tip prepared by the microwave plasma chemical vapordeposition technique. The reactant is a gas mixture of methane and hydrogen. Diamond crystals are grown on a tungsten tip. The diamond tipsare very hard and always have enough electrical conductivity for STM experiments. They can be used as a machining tool to scratch the metalsurfaces.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 29/11/20 alle ore 06:59:51