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Titolo:
LiNb1-xTaxO3 films prepared by thermal plasma spray CVD
Autore:
Yamamoto, H; Kulinich, SA; Terashima, K;
Indirizzi:
Univ Tokyo, Grad Sch Frontier Sci, Dept Adv Mat Sci, Bunkyo Ku, Tokyo 1138656, Japan Univ Tokyo Tokyo Japan 1138656 Mat Sci, Bunkyo Ku, Tokyo 1138656, Japan Univ Tokyo, Fac Engn, Dept Met & Mat Sci, Bunkyo Ku, Tokyo 1138656, Japan Univ Tokyo Tokyo Japan 1138656 Mat Sci, Bunkyo Ku, Tokyo 1138656, Japan
Titolo Testata:
THIN SOLID FILMS
fascicolo: 1-2, volume: 390, anno: 2001,
pagine: 1 - 6
SICI:
0040-6090(20010630)390:1-2<1:LFPBTP>2.0.ZU;2-I
Fonte:
ISI
Lingua:
ENG
Soggetto:
LINBO3 THIN-FILMS; CHEMICAL-VAPOR-DEPOSITION; PULSED-LASER DEPOSITION; PHASE EPITAXIAL-GROWTH; MICROSCOPY; SUBSTRATE; SAPPHIRE;
Keywords:
lithium niobate-tantalate (LiNb1-xTaxO3); thermal plasma spray CVD; high-rate deposition; metalorganic precursor;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
21
Recensione:
Indirizzi per estratti:
Indirizzo: Yamamoto, H Univ Tokyo, Grad Sch Frontier Sci, Dept Adv Mat Sci, Bunkyo Ku, Hongo 7-3-1, Tokyo 1138656, Japan Univ Tokyo Hongo 7-3-1 Tokyo Japan 1138656 kyo 1138656, Japan
Citazione:
H. Yamamoto et al., "LiNb1-xTaxO3 films prepared by thermal plasma spray CVD", THIN SOL FI, 390(1-2), 2001, pp. 1-6

Abstract

LiNb1-xTaxO3 films with x = 0.3-0.7, epitaxial orientation and good crystallinity were prepared by using thermal plasma spray CVD. Mixtures of metalorganic solutions containing lithium-niobium and lithium-tantalum alkoxides were used as liquid source materials. Preferentially (001)-oriented LiNb1-xTaxO3 films were fabricated on sapphire (001) substrates with deposition rates up to approximately 6 nm/s, which was approximately 100 times as fast as those of most conventional vapor phase deposition methods. LiNb1-xTaxO3 films with x = 0.5 achieved a (006) rocking curve full-width at half-maximumvalue of 0.15-0.20 degrees, which is comparable with those of LiNbO3 and LiTaO3 films grown by other conventional deposition techniques. This is the first success in preparing LiNb1-xTaxO3 films with x > 0.33, good crystallinity and high (001) orientation. (C) 2001 Elsevier Science B.V. Ah rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 20/09/20 alle ore 23:28:42