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Titolo:
Pressure and helium mixing effects on plasma parameters in temperature control using a grid system
Autore:
Bai, KH; Hong, JI; Chung, CW; Kim, SS; Chang, HY;
Indirizzi:
Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea Korea Adv Inst Sci & Technol Taejon South Korea 305701 5701, South Korea Samsung Elect, Seoul, South Korea Samsung Elect Seoul South KoreaSamsung Elect, Seoul, South Korea
Titolo Testata:
PHYSICS OF PLASMAS
fascicolo: 7, volume: 8, anno: 2001,
pagine: 3498 - 3501
SICI:
1070-664X(200107)8:7<3498:PAHMEO>2.0.ZU;2-B
Fonte:
ISI
Lingua:
ENG
Soggetto:
CYCLOTRON-RESONANCE PLASMA; HEATING-MODE TRANSITION; ETCHING REACTOR; ELECTRON; DISCHARGE; DIAGNOSTICS; RADICALS;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
21
Recensione:
Indirizzi per estratti:
Indirizzo: Bai, KH Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea Korea Adv Inst Sci & Technol Taejon South Korea 305701 uth Korea
Citazione:
K.H. Bai et al., "Pressure and helium mixing effects on plasma parameters in temperature control using a grid system", PHYS PLASMA, 8(7), 2001, pp. 3498-3501

Abstract

Pressure and He mixing effects on plasma parameters in electron temperature control using a grid system are investigated. Electron temperature is higher in lower pressure, when the electron temperature is high and not controlled. Electron density can be increased by about three times by decreasing the source gas pressure from 20 to 1 mTorr, and by about two times by He mixing in the temperature controlled region (diffusion region), while the electron density is decreased in the source region. This electron density increase is mainly due to the increase of the high energy electron population, and the measured electron energy distribution functions clearly show this. (C) 2001 American Institute of Physics.

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Documento generato il 30/11/20 alle ore 19:52:49