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Titolo:
MBE growth of HgCdTe epilayers with reduced visible defect densities: Kinetics considerations and substrate limitations
Autore:
Piquette, EC; Zandian, M; Edwall, DD; Arias, JM;
Indirizzi:
Rockwell Int Corp, Ctr Sci, Thousand Oaks, CA 91360 USA Rockwell Int CorpThousand Oaks CA USA 91360 Thousand Oaks, CA 91360 USA
Titolo Testata:
JOURNAL OF ELECTRONIC MATERIALS
fascicolo: 6, volume: 30, anno: 2001,
pagine: 627 - 631
SICI:
0361-5235(200106)30:6<627:MGOHEW>2.0.ZU;2-0
Fonte:
ISI
Lingua:
ENG
Soggetto:
MOLECULAR-BEAM EPITAXY; PHOTODIODES; HG1-XCDXTE; CRYSTALS;
Keywords:
HgCdTe; MBE; defects; kinetic effects; substrates;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
13
Recensione:
Indirizzi per estratti:
Indirizzo: Piquette, EC Rockwell Int Corp, Ctr Sci, 1049 Camino Dos Rios, Thousand Oaks, CA 91360 USA Rockwell Int Corp 1049 Camino Dos Rios Thousand Oaks CA USA 91360
Citazione:
E.C. Piquette et al., "MBE growth of HgCdTe epilayers with reduced visible defect densities: Kinetics considerations and substrate limitations", J ELEC MAT, 30(6), 2001, pp. 627-631

Abstract

A semi-empirical constraint to the thermodynamical model for growth of Hg1-xCdxTe (MCT) by molecular beam epitaxy is described. This constraint, derived by forcing the population of Hg atoms in a surface layer to be proportional to the HgTe fractional growth rate, can determine an optimal total growth rate for specific beam fluxes and substrate temperature. Utilizing improved growth conditions determined by this model has resulted in MCT layers with consistently lower visible defect density (e.g., voids). The majority of recent layers grown using the constrained conditions has achieved defectdensities limited by the CdZnTe substrate. On the highest quality substrates, total defect densities have consistently been reduced to the 100-200 cm(-2) range using the improved conditions for compositions x = 0.2 to x = 0.6. On more typical substrates, the total defect density is 1000-1500 cm(-2). This compares with densities of 3000-5000(+) cm(-2) for old layers grown under non-optimized conditions. The density of voids has remained about thesame upon using the improved conditions, and is determined primarily by the Te precipitate content of the substrate, but microdefect (hillock) density has been reduced by almost a factor of ten.

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Documento generato il 05/04/20 alle ore 06:56:01