Catalogo Articoli (Spogli Riviste)

OPAC HELP

Titolo:
Gravity-related transport process in off-axis sputtering deposition
Autore:
Zhu, S; Su, CH; Carpenter, P; Lehoczky, S;
Indirizzi:
NASA, George C Marshall Space Flight Ctr, USRA, SD47, Huntsville, AL 35812USA NASA Huntsville AL USA 35812 ght Ctr, USRA, SD47, Huntsville, AL 35812USA NASA, George C Marshall Space Flight Ctr, Micrograv Sci & Applicat Dept, Huntsville, AL 35812 USA NASA Huntsville AL USA 35812 ci & Applicat Dept, Huntsville, AL 35812 USA
Titolo Testata:
JOURNAL OF CRYSTAL GROWTH
fascicolo: 2-4, volume: 225, anno: 2001,
pagine: 522 - 527
SICI:
0022-0248(200105)225:2-4<522:GTPIOS>2.0.ZU;2-R
Fonte:
ISI
Lingua:
ENG
Soggetto:
THIN-FILMS; GROWTH;
Keywords:
mass transfer; physical vapor deposition processes; oxides; semiconducting II-VI materials;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
13
Recensione:
Indirizzi per estratti:
Indirizzo: Zhu, S NASA, George C Marshall Space Flight Ctr, USRA, SD47, Huntsville, AL 35812USA NASA Huntsville AL USA 35812 , USRA, SD47, Huntsville, AL 35812USA
Citazione:
S. Zhu et al., "Gravity-related transport process in off-axis sputtering deposition", J CRYST GR, 225(2-4), 2001, pp. 522-527

Abstract

In the reactive off-axis sputtering deposition of ZnO films, three transport regimes from a ballistic motion to a diffusive drift of the ejected species were observed when the growth pressures were varied from 5 to 150 mTorr, The distribution of the film thickness at different substrate locations was measured, When the substrate surface was parallel to the gravity vector,a film thickness variation along the direction of gravity was detected in the region of diffusive transport deposition. This phenomenon depends strongly on the growth pressures while only slightly on the growth temperatures. Based on experimental results, a gravity-related motion of the sputtered species is proposed in film growth under relative low growth pressures. (C) 2001 Elsevier Science B.V. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 22/09/20 alle ore 20:20:57