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Titolo:
Novel method for the formation of an aluminum parting layer in the fabrication of field emitter arrays
Autore:
Kang, SY; Jung, MY; Hwang, CS; Cho, YR; Song, YH; Lee, SK; Lee, JH; Cho, KI;
Indirizzi:
Elect & Telecommun Res Inst, Microelect Lab, Yusong Gu, Taejon 305350, South Korea Elect & Telecommun Res Inst Taejon South Korea 305350 05350, South Korea
Titolo Testata:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
fascicolo: 3, volume: 19, anno: 2001,
pagine: 925 - 928
SICI:
1071-1023(200105/06)19:3<925:NMFTFO>2.0.ZU;2-L
Fonte:
ISI
Lingua:
ENG
Soggetto:
REFLOW;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
--discip_EC--
Citazioni:
9
Recensione:
Indirizzi per estratti:
Indirizzo: Kang, SY Elect & Telecommun Res Inst, Microelect Lab, Yusong Gu, 161 Kajong Dong, Taejon 305350, South Korea Elect & Telecommun Res Inst 161 Kajong Dong Taejon South Korea 305350
Citazione:
S.Y. Kang et al., "Novel method for the formation of an aluminum parting layer in the fabrication of field emitter arrays", J VAC SCI B, 19(3), 2001, pp. 925-928

Abstract

We proposed a method for the formation of an aluminum parting layer in thefabrication of field emitter arrays, in which we used a reflow property ofaluminum at a lower temperature than the softening point of glass. In contrast to a conventional Spindt-type method, an aluminum layer was successively deposited on gate metal/dielectric layers by the usual sputter method and all the layers including the aluminum layer were etched together for the formation of gate holes. By a rapid thermal annealing process, the aluminumslightly diffused into the gate hole. This reflowed aluminum was used as aparting layer and emitter arrays were easily fabricated. (C) 2001 AmericanVacuum Society.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 27/09/20 alle ore 18:33:20