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Titolo:
Batch assembly micro-ball lens array for Si-based optical coupling platform in free space
Autore:
Shen, SC; Pan, CT; Chou, HP; Chou, MC;
Indirizzi:
Tsing Hua Univ, Dept Engn & Syst Sci, Hsinchu 101, Taiwan Tsing Hua Univ Hsinchu Taiwan 101 t Engn & Syst Sci, Hsinchu 101, Taiwan Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 101, Taiwan Tsing Hua Univ Hsinchu Taiwan 101 pt Mat Sci & Engn, Hsinchu 101, Taiwan Ind Technol Res Inst, Hsinchu, Taiwan Ind Technol Res Inst Hsinchu Taiwan d Technol Res Inst, Hsinchu, Taiwan
Titolo Testata:
OPTICAL REVIEW
fascicolo: 5, volume: 8, anno: 2001,
pagine: 373 - 377
SICI:
1340-6000(200109/10)8:5<373:BAMLAF>2.0.ZU;2-2
Fonte:
ISI
Lingua:
ENG
Soggetto:
TORSION MIRRORS; SWITCHES;
Keywords:
optical coupling platform; micro-ball lens; v-groove; wafer bonding; anisotropic etching;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
11
Recensione:
Indirizzi per estratti:
Indirizzo: Shen, SC Tsing Hua Univ, Dept Engn & Syst Sci, Sect 2,Kuang Fu Rd Hsinchu,Hsinchu 101, Taiwan Tsing Hua Univ Sect 2,Kuang Fu Rd Hsinchu Hsinchu Taiwan 101 wan
Citazione:
S.C. Shen et al., "Batch assembly micro-ball lens array for Si-based optical coupling platform in free space", OPT REV, 8(5), 2001, pp. 373-377

Abstract

The paper presents novel concepts of batch fabrication of micro-ball lens array technology integrated on the silicon-based wafer which can improve the appropriate distance for optical fiber coupling. The silicon-based optical coupling platform consists of a self-parking framework (including flat-topped mesa and intersection of two v-grooves) and micro-ball lens array for optical fiber coupling purposes. The structure of optical coupling platformis able to improve the distance between fiber and micro-ball lens and to increase coupling efficiency. Optical measurement reveals an insertion loss below 2.5 dB with wavelength 635 nm in single-mode fiber. The micro-ball lens array is batch fabricated by polymeric material and thick photoresist, and then bonded onto a flat-topped mesa that adjoins to the v-groove. The corner compensation offers a method to fabricate the flat-topped mesa in the intersection of two v-grooves. This fabrication process not only provides accurate coupling distance between fibers and micro-ball lens, but also reduces micro-assembly cost.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 23/09/20 alle ore 04:17:02