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Titolo:
Measurement of two-dimensional distribution of pure axial force in active polishing
Autore:
Kim, SW; Walker, D;
Indirizzi:
Yonsei Univ, Ctr Space Astrophys, Sudamun Gu, Seoul 134, South Korea Yonsei Univ Seoul South Korea 134 ys, Sudamun Gu, Seoul 134, South Korea Univ Coll London, Dept Phys & Astron, Opt Sci Lab, London WC1E 6BT, England Univ Coll London London England WC1E 6BT i Lab, London WC1E 6BT, England CALTECH, Phys Math & Astron Div, Pasadena, CA 91125 USA CALTECH Pasadena CA USA 91125 s Math & Astron Div, Pasadena, CA 91125 USA
Titolo Testata:
MEASUREMENT SCIENCE & TECHNOLOGY
fascicolo: 11, volume: 12, anno: 2001,
pagine: 1976 - 1982
SICI:
0957-0233(200111)12:11<1976:MOTDOP>2.0.ZU;2-B
Fonte:
ISI
Lingua:
ENG
Soggetto:
OPTICS;
Keywords:
polishing; force distribution; sensor array; characterization; non-axial force compensation;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
14
Recensione:
Indirizzi per estratti:
Indirizzo: Kim, SW Yonsei Univ, Ctr Space Astrophys, Sudamun Gu, Seoul 134, South Korea Yonsei Univ Seoul South Korea 134 mun Gu, Seoul 134, South Korea
Citazione:
S.W. Kim e D. Walker, "Measurement of two-dimensional distribution of pure axial force in active polishing", MEAS SCI T, 12(11), 2001, pp. 1976-1982

Abstract

We present a new technique of real-time measurement for the pure axial force distribution exerted by a full size active polishing tool on large. aspheric surfaces. The technique uses art array of custom developed flat line load cells incorporating semiconductor strain gauges that can withstand the large shear forces in polishing. Design, manufacture and characterization of the force sensor array and its instrumentation to the active polisher aredescribed. In particular, thermal characterization of the sensors proved that the temperature change by a few degrees required for a polishing tool has negligible effects on sensitivity and zero-point offset. Effects of non axial force components were compensated with four independent half-bridge signals inside a sensor unit. This was further removed with a gap condition between the sensor array and the structural membrane, of which the latter functions as a point of pushing and pulling the polishing lap. The sensor array shows a potential usage in detecting and controlling the non-axial force components in operation. The real-time graphical map of axial polishing force generated by the sensor array improved the polishing efficiency by at least 30% compared to the traditional polishing technique.

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Documento generato il 30/09/20 alle ore 08:43:09