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Titolo:
Influence of inversion domains on formation of V-shaped pits in GaN films
Autore:
Li, HD; Wang, T; Lacroix, Y; Jiang, N; Sakai, S;
Indirizzi:
Univ Tokushima, Satellite Venture Business Lab, Tokushima 7708506, Japan Univ Tokushima Tokushima Japan 7708506 ess Lab, Tokushima 7708506, Japan Nitride Semicond Co Ltd, Naruto, Tokushima 7710360, Japan Nitride SemicondCo Ltd Naruto Tokushima Japan 7710360 ima 7710360, Japan Univ Tokushima, Dept Elect & Elect Engn, Tokushima 7708506, Japan Univ Tokushima Tokushima Japan 7708506 ct Engn, Tokushima 7708506, Japan
Titolo Testata:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
fascicolo: 11B, volume: 40, anno: 2001,
pagine: L1254 - L1256
SICI:
0021-4922(20011115)40:11B<L1254:IOIDOF>2.0.ZU;2-E
Fonte:
ISI
Lingua:
ENG
Soggetto:
CHEMICAL-VAPOR-DEPOSITION; MULTIPLE-QUANTUM WELLS; SAPPHIRE; DEFECTS;
Keywords:
gallium nitride film; inversion domain; V-shaped pit; TEM;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
11
Recensione:
Indirizzi per estratti:
Indirizzo: Li, HD Univ Tokushima, Satellite Venture Business Lab, 2-1 Minami Josanjima, Tokushima 7708506, Japan Univ Tokushima 2-1 Minami Josanjima Tokushima Japan 7708506 Japan
Citazione:
H.D. Li et al., "Influence of inversion domains on formation of V-shaped pits in GaN films", JPN J A P 2, 40(11B), 2001, pp. L1254-L1256

Abstract

The influence of inversion domains (IDs) on the formation of V-shaped pitsin GaN films grown by metalorganic chemical vapor deposition has been investigated using transmission electron microscopy. It was found that IDs can induce V-shaped pits which have a large size distribution. Upon introducingInGaN/GaN multiple-quantum wells to observe various growth stages, our results showed that the origin of these TD-induced pits may be a delayed formation of the IDs during island-island coalescence at the initial stage of film growth, thus we need not adopt a general explanation based on the different growth rates for the two opposite polarities.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 09/04/20 alle ore 07:43:27