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Titolo:
Fabrication of electron emitter device using polycrystalline diamond film
Autore:
Hatta, A; Sumitomo, T; Inomoto, H; Hiraki, A;
Indirizzi:
Kochi Univ Technol, Dept Elect & Photon Syst Engn, Kochi 7828502, Japan Kochi Univ Technol Kochi Japan 7828502 n Syst Engn, Kochi 7828502, Japan
Titolo Testata:
NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY
fascicolo: 5, volume: 11, anno: 2001,
pagine: 307 - 312
SICI:
1344-9931(2001)11:5<307:FOEEDU>2.0.ZU;2-J
Fonte:
ISI
Lingua:
ENG
Soggetto:
FIELD-EMISSION;
Keywords:
electron emitter; polycrystalline diamond film; diamond-like carbon; plasma etching;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
11
Recensione:
Indirizzi per estratti:
Indirizzo: Hatta, A Kochi Univ Technol, Dept Elect & Photon Syst Engn, 185 Miyanokuchi,Tosayamada Cho, Kochi 7828502, Japan Kochi Univ Technol 185 Miyanokuchi,Tosayamada Cho Kochi Japan 7828502
Citazione:
A. Hatta et al., "Fabrication of electron emitter device using polycrystalline diamond film", NEW DIAM FR, 11(5), 2001, pp. 307-312

Abstract

An electron emitter device using a polycrystalline diamond film has been developed. The device is composed of a cathode of a polycrystalline diamond film, gate electrodes of aluminum, and an insulating layer of a diamond-like carbon film. The diamond film was deposited on an n-type Si wafer by the conventional microwave plasma chemical vapor deposition (CVD) method, the diamond-like carbon film was deposited by an electron cyclotron resonance (ECR) plasma CVD method, and the aluminum electrodes were deposited by an electron beam evaporator and patterned by photolithography. The diamondlike carbon layer on the cathode was removed by oxygen plasma etching. Electron emission from the cathode to the gate electrodes was observed at a gate voltage of more than 30 V and the emission current was 0.5 mA at 40 V.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 07/07/20 alle ore 22:36:22