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Titolo:
Observation of silicon surface nanoholes by scanning tunneling microscopy
Autore:
Ozaki, N; Ohno, Y; Tanbara, M; Hamada, D; Yamasaki, J; Takeda, S;
Indirizzi:
Osaka Univ, Grad Sch Sci, Dept Phys, Toyonaka, Osaka 5600043, Japan Osaka Univ Toyonaka Osaka Japan 5600043 s, Toyonaka, Osaka 5600043, Japan
Titolo Testata:
SURFACE SCIENCE
fascicolo: 1-3, volume: 493, anno: 2001,
pagine: 547 - 554
SICI:
0039-6028(20011101)493:1-3<547:OOSSNB>2.0.ZU;2-F
Fonte:
ISI
Lingua:
ENG
Soggetto:
SI(111) SURFACES;
Keywords:
scanning tunneling microscopy; surface diffusion; surface structure, morphology, roughness, and topography; silicon; surface defects;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
14
Recensione:
Indirizzi per estratti:
Indirizzo: Ozaki, N Osaka Univ, Grad Sch Sci, Dept Phys, 116 Machikaneyama, Toyonaka,Osaka 5600043, Japan Osaka Univ 116 Machikaneyama Toyonaka Osaka Japan 5600043 , Japan
Citazione:
N. Ozaki et al., "Observation of silicon surface nanoholes by scanning tunneling microscopy", SURF SCI, 493(1-3), 2001, pp. 547-554

Abstract

We have studied electron-irradiation-induced defects created on an electron exit surface of a Si thin film by means of scanning tunneling microscopy (STM). Several electron-irradiated areas with different electron doses are provided for STM observation. Transmission electron microscopy (TEM) observation reveals a number of silicon-surface-nanoholes of 2-3 nm in diameter and about 5 nm apart in an irradiated area whenever it receives the dose larger than 1.5 x 10(24) e/cm(2), while no distinctive TEM contrast of defectsis observed in an area with lower dose. STM observation has shown that electron-irradiated surfaces are rougher than a nonirradiated surface. Examining the depth distribution of the areas with different doses, we have found that each irradiated surface exhibits two depth levels which are attributedto a rough surface and a bottom of surface nanoholes, respectively. Even in an area with the lowest dose (1.5 x 10(22) e/cm(2)) in this experiment wehave observed distinctive STM contrasts, the arrangement and sizes of which are similar to those of the well-developed surface nanoholes observable by TEM. This STM observation shows that the arrangement of nanoholes on an electron exit surface is set up at the very early stage, followed by the excavating of nanoholes under prolonged electron irradiation. We suggest that nanoholes exist in the early stage when only a few atomic layers are removed from the initial surface. (C) 2001 Elsevier Science B.V. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 05/12/20 alle ore 01:43:26