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Titolo:
Internal stresses and microstructures of commercial thick diamond films deposited by different deposition methods
Autore:
Kuo, CT; Wu, JY; Lin, CH; Lu, TR; Sung, CM;
Indirizzi:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30050, Taiwan Natl Chiao Tung Univ Hsinchu Taiwan 30050 & Engn, Hsinchu 30050, Taiwan Ritek Display Technol Corp, Hsinchu 303, Taiwan Ritek Display Technol Corp Hsinchu Taiwan 303 Corp, Hsinchu 303, Taiwan Taipei Univ Technol, Dept Mat & Resources Engn, Taipei, Taiwan Taipei UnivTechnol Taipei Taiwan Mat & Resources Engn, Taipei, Taiwan
Titolo Testata:
MATERIALS CHEMISTRY AND PHYSICS
fascicolo: 2, volume: 72, anno: 2001,
pagine: 114 - 120
SICI:
0254-0584(20011101)72:2<114:ISAMOC>2.0.ZU;2-M
Fonte:
ISI
Lingua:
ENG
Soggetto:
CHEMICAL-VAPOR-DEPOSITION; CVD DIAMOND; MICROWAVE PLASMA; X-RAY; RAMAN; GROWTH; SPECTRA; PHASES;
Keywords:
plasma-assisted CVD; mechanical properties; X-ray diffraction; optical properties;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
21
Recensione:
Indirizzi per estratti:
Indirizzo: Kuo, CT Natl Chiao Tung Univ, Dept Mat Sci & Engn, 1001 Ta Hsueh Rd, Hsinchu 30050, Taiwan Natl Chiao Tung Univ 1001 Ta Hsueh Rd Hsinchu Taiwan 30050 Taiwan
Citazione:
C.T. Kuo et al., "Internal stresses and microstructures of commercial thick diamond films deposited by different deposition methods", MATER CH PH, 72(2), 2001, pp. 114-120

Abstract

Structures and stress state of six commercial freestanding thick diamond films (> 300 mum) were analyzed by scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray diffraction (XRD), and Raman spectroscopy. These films represent the typical samples synthesized by three different chemical vapor deposition (CVD) methods, including DC are, microwave plasma, and hot filament. It was found that the higher diamond deposition rate it reaches, the more non-diamond carbons it contains, and the larger the residual compressive stress it possesses. Moreover, the samples with the highest degree of optical transparency are under the lowest compressive stress. These crystal characteristics can be manipulated by selecting different deposition methods and parameters that affect nucleation rate and growth rate of diamond. The present results show that the DC are method gives poorly developed crystals, and its residual compressive stress of the films is the highest due to the fastest diamond nucleation and crystal growth rates. (C) 2001 Elsevier Science B.V. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 22/09/20 alle ore 23:18:59