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Titolo:
MOCVD of antimony oxides for gas sensor applications
Autore:
Haycock, PW; Horley, GA; Molloy, KC; Myers, CP; Rushworth, SA; Smith, LM;
Indirizzi:
Univ Keele, Sch Chem & Phys, Lennard Jones Labs, Birchall Ctr Inorgan Chem& Mat Sci, Keele ST5 5BG, Staffs, England Univ Keele Keele Staffs England ST5 5BG i, Keele ST5 5BG, Staffs, England Univ Bath, Dept Chem, Bath BA2 7AY, Avon, England Univ Bath Bath Avon England BA2 7AY ept Chem, Bath BA2 7AY, Avon, England Epichem Ltd, Wirral CH62 3QF, Merseyside, England Epichem Ltd Wirral Merseyside England CH62 3QF 2 3QF, Merseyside, England
Titolo Testata:
JOURNAL DE PHYSIQUE IV
fascicolo: PR3, volume: 11, anno: 2001,
pagine: 1045 - 1050
SICI:
1155-4339(200108)11:PR3<1045:MOAOFG>2.0.ZU;2-E
Fonte:
ISI
Lingua:
ENG
Soggetto:
CHEMICAL-VAPOR-DEPOSITION; DILUTE HYDROGEN-SULFIDE; DIOXIDE THIN-FILM; ELECTRICAL-PROPERTIES; SENSING PROPERTIES; DOPED SNO2; TIN; SURFACE; IMPROVEMENT; SENSITIVITY;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
31
Recensione:
Indirizzi per estratti:
Indirizzo: Haycock, PW Univ Keele, Sch Chem & Phys, Lennard Jones Labs, Birchall Ctr Inorgan Chem& Mat Sci, Keele ST5 5BG, Staffs, England Univ Keele Keele Staffs England ST5 5BG 5BG, Staffs, England
Citazione:
P.W. Haycock et al., "MOCVD of antimony oxides for gas sensor applications", J PHYS IV, 11(PR3), 2001, pp. 1045-1050

Abstract

Thin films of Sb2O3 (senarmonite) have been grown by MOCVD from ((BUO)-B-n)(3)Sb in the temperature range 500 - 550 degreesC without addition of a separate oxygen source. In addition, films of Sb6O13 have been deposited at 600 degreesC using (EtO)(3)Sb as the precursor; this latter process is enhanced by the addition of O-2. Preliminary gas sensor trials using the senarmontite films have shown them to have a very high electrical resistance. Theyexhibit a rapid response to methane and full recovery once the methane is removed.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 28/09/20 alle ore 23:00:08