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Titolo:
Composition, morphology and particle size control in nanocrystalline iron oxide films grown by single-source CVD
Autore:
Mathur, S; Veith, M; Sivakov, V; Shen, H; Gao, HB;
Indirizzi:
Univ Saarland, Inst Inorgan Chem, D-66041 Saarbrucken, Germany Univ Saarland Saarbrucken Germany D-66041 , D-66041 Saarbrucken, Germany Univ Saarland, Inst Expt Phys, D-66041 Saarbrucken, Germany Univ SaarlandSaarbrucken Germany D-66041 , D-66041 Saarbrucken, Germany
Titolo Testata:
JOURNAL DE PHYSIQUE IV
fascicolo: PR3, volume: 11, anno: 2001,
pagine: 487 - 494
SICI:
1155-4339(200108)11:PR3<487:CMAPSC>2.0.ZU;2-B
Fonte:
ISI
Lingua:
ENG
Soggetto:
CHEMICAL-VAPOR-DEPOSITION; MOLECULAR-BEAM EPITAXY; SOURCE PRECURSOR CVD; THIN-FILMS; MOCVD; FE3O4;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
21
Recensione:
Indirizzi per estratti:
Indirizzo: Mathur, S Univ Saarland, Inst Inorgan Chem, D-66041 Saarbrucken, Germany Univ Saarland Saarbrucken Germany D-66041 Saarbrucken, Germany
Citazione:
S. Mathur et al., "Composition, morphology and particle size control in nanocrystalline iron oxide films grown by single-source CVD", J PHYS IV, 11(PR3), 2001, pp. 487-494

Abstract

Nanocrystalline iron oxide films have been deposited onto various substrates in a cold-wall CVD reactor using iron (III) tert-butoxide as a single-source for iron and oxygen. Influence of the CVD parameters on the growth rate, chemical composition, morphology and crystalline phases has been investigated. The Fe:O stoichiometry in the films is sensitive to the deposition conditions, For instance, the interplay between precursor flux/deposition temperature allows a fine control over deposition of different iron oxide phases (hematite, maghemite and magnetite) and their interconversion. The different iron oxides could be detected by their typical morphological featuresand confirmed by XRD and XPS data of the deposits. At 350 degreesC and below, ultrafine amorphous iron oxide grains with size lower than 10 mn are produced which, can be transformed to crystalline hematite or magnetite phases by ex-situ annealing. Spinel-type Fe3O4 was formed as a singular phase oncopper at 450 degreesC, which could be converted to Fe2O3 upon annealing. On silicon, a mixture of magnetite and hematite was formed at 450 degreesC while a solid solution of the two phases resulted at 500 degreesC. Transmission spectra of films deposited on glass show them to be transparent to visible light. The results are discussed in the light of XRD, SEM-EDX, XPS, AFM and elemental analysis.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 10/07/20 alle ore 09:39:44