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Titolo:
Mechanism of thermal decomposition of silanes
Autore:
Onischuk, AA; Panfilov, VN;
Indirizzi:
Russian Acad Sci, Inst Chem Kinet & Combust, Siberian Branch, Novosibirsk 630090, Russia Russian Acad Sci Novosibirsk Russia 630090 h, Novosibirsk 630090, Russia
Titolo Testata:
USPEKHI KHIMII
fascicolo: 4, volume: 70, anno: 2001,
pagine: 368 - 381
SICI:
0042-1308(2001)70:4<368:MOTDOS>2.0.ZU;2-8
Fonte:
ISI
Lingua:
RUS
Soggetto:
CHEMICAL-VAPOR-DEPOSITION; HYDROGENATED AMORPHOUS-SILICON; A-SI-H; MOLECULAR-BEAM EPITAXY; INTERNAL-REFLECTION SPECTROSCOPY; SCANNING-TUNNELING-MICROSCOPY; DEPENDENT ADSORPTION-KINETICS; LOW-PRESSURE DEPOSITION; LASER-DRIVEN REACTIONS; GAS-PHASE NUCLEATION;
Tipo documento:
Review
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
211
Recensione:
Indirizzi per estratti:
Indirizzo: Onischuk, AA Russian Acad Sci, Inst Chem Kinet & Combust, Siberian Branch,3 Ul Inst Skaya, Novosibirsk 630090, Russia Russian Acad Sci 3 Ul Inst Skaya Novosibirsk Russia 630090 a
Citazione:
A.A. Onischuk e V.N. Panfilov, "Mechanism of thermal decomposition of silanes", USP KH, 70(4), 2001, pp. 368-381

Abstract

Data on the mechanism of thermal decomposition of silanes are generalised. The main stages of the process are distinguished and characterised. Attention is concentrated on the elementary homogeneous reactions, deposition of silicon from the gas phase and formation of aerosols. Various models of formation of aerosols are considered. The results of theoretical and experimental investigations of this process are discussed. Data on the chemical decomposition of the solid product of silane pyrolysis (wall deposit and aerosol particles) are presented. It is noted that the hydrogen content in the solid product varies over wide limits.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 05/12/20 alle ore 19:52:26