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Titolo:
Dynamics of pulsed d.c. discharges used for PACVD - effect of additional high voltage pulses
Autore:
Kugler, C; Fink, M; Laimer, J; Stori, H;
Indirizzi:
Vienna Tech Univ, Inst Allgemeine Phys, A-1040 Vienna, Austria Vienna TechUniv Vienna Austria A-1040 eine Phys, A-1040 Vienna, Austria
Titolo Testata:
SURFACE & COATINGS TECHNOLOGY
, volume: 142, anno: 2001,
pagine: 424 - 428
SICI:
0257-8972(200107)142:<424:DOPDDU>2.0.ZU;2-3
Fonte:
ISI
Lingua:
ENG
Soggetto:
DEPOSITION;
Keywords:
PACVD; pulsed discharge; plasma dynamics; titanium nitride; uniform deposition;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Engineering, Computing & Technology
Citazioni:
7
Recensione:
Indirizzi per estratti:
Indirizzo: Laimer, J Vienna Tech Univ, Inst Allgemeine Phys, Wiedner Hauptstr 8-10, A-1040 Vienna, Austria Vienna Tech Univ Wiedner Hauptstr 8-10 Vienna Austria A-1040 ia
Citazione:
C. Kugler et al., "Dynamics of pulsed d.c. discharges used for PACVD - effect of additional high voltage pulses", SURF COAT, 142, 2001, pp. 424-428

Abstract

Plasma-assisted chemical vapor deposition (PACVD) of titanium nitride is mostly performed with pulsed d.c. glow discharges using titanium tetrachloride as a component of the feed stock gas. Recent investigations of the dynamics of such discharges have shown that, in large reactors under certain loading conditions, the spreading of the discharge is slow, reaching some parts of the reactor with substantial delay. The result is a non-uniform plasmapower density in front of the substrates as well as a spatially varying exposure time of the surface to the plasma. The present study investigates the possibility of improving the ignition and spreading behavior of the discharge by the use of additional synchronized short high voltage pulses. The position of the high voltage pulse was varied between 2 mus before and 15 mus after the leading edge of the conventional pulse. Peak voltages up to -1600 V with a duration of 440 ns were used. It turned out that the superposition of short high voltage pulses with a peak voltage of -1300 V at the beginning of the conventional pulses (independent of the exact position) enabled an immediate ignition and spreading of the discharge across the reactor, ensuring time-independent and uniform discharge conditions. (C) 2001 Elsevier Science B.V. All rights reserved.

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Documento generato il 01/12/20 alle ore 16:38:43