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Titolo:
Real-time displacement measurements with a Fabry-Perot cavity and a diode laser
Autore:
Howard, L; Stone, J; Fu, J;
Indirizzi:
NIST, Div Precis Engn, Gaithersburg, MD 20899 USA NIST Gaithersburg MD USA 20899 iv Precis Engn, Gaithersburg, MD 20899 USA
Titolo Testata:
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISIONENGINEERING AND NANOTECHNOLOGY
fascicolo: 4, volume: 25, anno: 2001,
pagine: 321 - 335
SICI:
0141-6359(200110)25:4<321:RDMWAF>2.0.ZU;2-#
Fonte:
ISI
Lingua:
ENG
Soggetto:
FREQUENCY-MODULATION SPECTROSCOPY; UPDATED EDLEN EQUATION; REFRACTIVE-INDEX; NANO-METROLOGY; CALIBRATION; STABILIZATION; AIR;
Keywords:
diode laser; nanometrology; Fabry-Perot interferometer; optical mixing errors; optical heterodyne frequency measurement; microwave frequency counter; AFM;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Engineering, Computing & Technology
Citazioni:
22
Recensione:
Indirizzi per estratti:
Indirizzo: Stone, J NIST, Div Precis Engn, 100 Bur Dr,Mail Stop 8212, Gaithersburg, MD 20899 USA NIST 100 Bur Dr,Mail Stop 8212 Gaithersburg MD USA 20899 0899 USA
Citazione:
L. Howard et al., "Real-time displacement measurements with a Fabry-Perot cavity and a diode laser", PRECIS ENG, 25(4), 2001, pp. 321-335

Abstract

We present the basic operating principles of a traceable measurement system suitable for use with atomic force microscopes (AFMs) and nanometer-resolution displacement sensors. Our method is based upon a tunable external-cavity diode laser system which is servo-locked via a phase-modulated heterodyne locking technique to a Fabry-Perot interferometer cavity. We discuss mechanical considerations for the use of this cavity as a displacement metrology system and we describe methods for making real-time (sub 10 ms sampling period) measurements of the optical heterodyne signals. Our interferometer system produces a root-mean-squared (RMS) displacement measurement resolution of 20 pm. Two applications of the system are described. First, the system was used to examine known optical mixing errors in a heterodyne Michelsoninterferometer. Second, the Fabry-Perot interferometer was integrated intothe Z axis of a commercial AFM scanning stage and used to produce interferometer-based images of a 17 nm step height specimen. We also demonstrate atomic resolution interferometer-based images of a 0.3 nm silicon single atomic step-terrace specimen. (C) 2001 Elsevier Science Inc. All rights reserved.

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Documento generato il 04/04/20 alle ore 08:36:04