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Titolo:
A new type of scanning electron microscope using the coaxial backscatteredelectrons
Autore:
Jiang, CZ; Morin, P; Rosenberg, N;
Indirizzi:
Wuhan Univ, Dept Phys, Wuhan 430072, Peoples R China Wuhan Univ Wuhan Peoples R China 430072 s, Wuhan 430072, Peoples R China Univ Lyon 1, Dept Phys Mat, F-69622 Villeurbanne, France Univ Lyon 1 Villeurbanne France F-69622 at, F-69622 Villeurbanne, France Univ Lyon 1, Lab Elect Nanotechnol Capteurs, F-69622 Villeurbanne, France Univ Lyon 1 Villeurbanne France F-69622 rs, F-69622 Villeurbanne, France
Titolo Testata:
MICRON
fascicolo: 1, volume: 33, anno: 2002,
pagine: 69 - 74
SICI:
0968-4328(2002)33:1<69:ANTOSE>2.0.ZU;2-M
Fonte:
ISI
Lingua:
ENG
Soggetto:
MONTE-CARLO SIMULATIONS; SEM;
Keywords:
scanning electron microscope; backscattered electron; coaxial detection; Monte Carlo simulation; backscattering coefficient; composition analysis;
Tipo documento:
Review
Natura:
Periodico
Settore Disciplinare:
Life Sciences
Citazioni:
12
Recensione:
Indirizzi per estratti:
Indirizzo: Jiang, CZ Wuhan Univ, Dept Phys, Wuhan 430072, Peoples R China Wuhan UnivWuhan Peoples R China 430072 30072, Peoples R China
Citazione:
C.Z. Jiang et al., "A new type of scanning electron microscope using the coaxial backscatteredelectrons", MICRON, 33(1), 2002, pp. 69-74

Abstract

A new coaxial detection system for backscattered electrons in SEM is described. This coaxial detection system allows us to collect only the backscattered electrons that have lost a small percentage of the primary energy, emerging from the sample surface with a take-off angle defined by the objective lens. This new configuration reinforces the atomic-number contrast and suppresses effectively the topographic contrast. The simulation and experimental results confirm these expectations: this new type of SEM is very suitable for observing differences in atomic number. Moreover, by associating theobtained image with a conventional secondary electron image, we build a third (color) image that allows us to give finally at the same time, in a single image, both of the chemical and topographic information. (C) 2001 Elsevier Science Ltd. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 09/04/20 alle ore 11:57:08