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Titolo:
The X-ray single crystal structure of [Me2In(acac)](2) and its use as a single-source precursor for the deposition of indium oxide thin films
Autore:
Park, JH; Horley, GA; OBrien, P; Jones, AC; Motevalli, M;
Indirizzi:
Univ London Imperial Coll Sci Technol & Med, Dept Chem, London SW7 2AY, England Univ London Imperial Coll Sci Technol & Med London England SW7 2AY gland Epichem Ltd, Wirral CH62 3QF, Merseyside, England Epichem Ltd Wirral Merseyside England CH62 3QF 2 3QF, Merseyside, England Univ London Queen Mary & Westfield Coll, Dept Chem, London E1 4NS, EnglandUniv London Queen Mary & Westfield Coll London England E1 4NS S, England
Titolo Testata:
JOURNAL OF MATERIALS CHEMISTRY
fascicolo: 9, volume: 11, anno: 2001,
pagine: 2346 - 2349
SICI:
0959-9428(2001)11:9<2346:TXSCSO>2.0.ZU;2-X
Fonte:
ISI
Lingua:
ENG
Soggetto:
CHEMICAL VAPOR-DEPOSITION;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
19
Recensione:
Indirizzi per estratti:
Indirizzo: O'Brien, P Univ Manchester, Manchester Mat Sci Ctr, Oxford Rd, Manchester M13 9PL, Lancs, England Univ Manchester Oxford Rd Manchester Lancs England M13 9PL land
Citazione:
J.H. Park et al., "The X-ray single crystal structure of [Me2In(acac)](2) and its use as a single-source precursor for the deposition of indium oxide thin films", J MAT CHEM, 11(9), 2001, pp. 2346-2349

Abstract

Crystalline dimethyl(pentane-2,4-dionato)indium(III), [Me2In(acac)](2), has been prepared by the reaction of dimethylindium methoxide and pentane-2,4-dione in toluene. An X-ray structure determination shows that in the solidstate, the complex is dimeric. [Me2In(acac)](2) has been used as a single-source precursor for the deposition cubic In2O3 thin films by low pressure metal-organic chemical vapour deposition (LP-MOCVD) at temperatures rangingfrom. 350 to 450 degreesC, on borosilicate glass, Si(100) and GaAs(111) substrates. All the as-deposited indium oxide films are single phase, cubic-In2O3.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 24/09/20 alle ore 22:32:44