Catalogo Articoli (Spogli Riviste)

OPAC HELP

Titolo:
Carbon films for use as the electron source in a parallel e-beam lithography system
Autore:
Milne, WI; Teo, KBK; Chhowalla, M; Amaratunga, GAJ; Yuan, J; Robertson, J; Legagneux, P; Pirio, G; Pribat, D; Bouzehouane, K; Bruenger, W; Trautmann, C;
Indirizzi:
Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England Univ Cambridge Cambridge England CB2 1PZ ngn, Cambridge CB2 1PZ, England THALES Res & Technol, F-91404 Orsay, France THALES Res & Technol Orsay France F-91404 Technol, F-91404 Orsay, France CNRS, UMR 137, THALES, F-91404 Orsay, France CNRS Orsay France F-91404CNRS, UMR 137, THALES, F-91404 Orsay, France Fraunhofer ISiT, D-25524 Itzehoe, Germany Fraunhofer ISiT Itzehoe Germany D-25524 r ISiT, D-25524 Itzehoe, Germany GSI Darmstadt, D-64291 Darmstadt, Germany GSI Darmstadt Darmstadt Germany D-64291 tadt, D-64291 Darmstadt, Germany
Titolo Testata:
NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY
fascicolo: 4, volume: 11, anno: 2001,
pagine: 235 - 247
SICI:
1344-9931(2001)11:4<235:CFFUAT>2.0.ZU;2-1
Fonte:
ISI
Lingua:
ENG
Soggetto:
TETRAHEDRAL AMORPHOUS-CARBON; FIELD-EMISSION PROPERTIES; DIAMOND-LIKE CARBON; NANOTUBE; ARC;
Keywords:
field emission; diamond-like carbon; carbon nanotubes;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
20
Recensione:
Indirizzi per estratti:
Indirizzo: Milne, WI Univ Cambridge, Dept Engn, Trumpington St, Cambridge CB2 1PZ, England Univ Cambridge Trumpington St Cambridge England CB2 1PZ England
Citazione:
W.I. Milne et al., "Carbon films for use as the electron source in a parallel e-beam lithography system", NEW DIAM FR, 11(4), 2001, pp. 235-247

Abstract

The overall aim of this work is to produce a parallel e-beam lithography system using an array of field-emitting microguns independently driven by anactive matrix array. This paper will describe the work carried out on optimisation of suitable carbon-based materials for use as the electron emittersource in such a system. From initial experiments on field emission from tetrahedrally bonded amorphous carbon (ta-C) and nanocluster carbon films, it has been deduced that emission occurs from nanometre-size sp(2) sites within an insulating sp(3) matrix. Hence, we have carried out a series of experiments to investigate the possibility of deliberately producing such sp(2)regions within a predominantly sp(3) matrix using e-beam irradiation, highenergy ion beam irradiation and post deposition plasma processing of ta-C. Unfortunately, although the use of I GeV uranium ions successfully produced arrays of sp(2) rich regions on the required nanometre scale, no preferential field emission from such sites could be obtained. The final series of experiments were thence carried out using aligned carbon nanotubes (CNTs) as the electron sources. Results on aligned CNTs, grown using a dc plasma technique and a Ni catalyst, are presented. Both the diameter and length of the CNTs are dependent upon the thickness of the catalytic layer used. Fieldemission from an array of CNTs was obtained.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 04/07/20 alle ore 12:51:44