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Titolo:
Useful yields of MCs+ and MCs2+ clusters: a comparative study between the Cameca IMS 4f and the Cation Mass Spectrometer
Autore:
Wirtz, T; Duez, B; Migeon, HN; Scherrer, H;
Indirizzi:
CRP Gabriel Lippmann, Lab Analyse Mat, L-1511 Luxembourg, Luxembourg CRP Gabriel Lippmann Luxembourg Luxembourg L-1511 Luxembourg, Luxembourg Ecole Mines, Phys Mat Lab, F-54042 Nancy, France Ecole Mines Nancy France F-54042 es, Phys Mat Lab, F-54042 Nancy, France
Titolo Testata:
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY
fascicolo: 1, volume: 209, anno: 2001,
pagine: 57 - 67
SICI:
1387-3806(20010824)209:1<57:UYOMAM>2.0.ZU;2-7
Fonte:
ISI
Lingua:
ENG
Soggetto:
SECONDARY-ION EMISSION; MOLECULAR-IONS; SIMS ANALYSIS; DEPENDENCE; COVERAGE;
Keywords:
secondary ion mass spectrometry; quantification; cesium clusters; useful yield; stationary cesium surface concentration;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
23
Recensione:
Indirizzi per estratti:
Indirizzo: Wirtz, T CRP Gabriel Lippmann, Lab Analyse Mat, 162A Av Faiencerie, L-1511Luxembourg, Luxembourg CRP Gabriel Lippmann 162A Av Faiencerie LuxembourgLuxembourg L-1511
Citazione:
T. Wirtz et al., "Useful yields of MCs+ and MCs2+ clusters: a comparative study between the Cameca IMS 4f and the Cation Mass Spectrometer", INT J MASS, 209(1), 2001, pp. 57-67

Abstract

The useful yields of MCs+ and MCs2+ clusters strongly depend on the stationary cesium surface concentration c(Cs) incorporated in the specimen duringthe primary bombardment. The Cation Mass Spectrometer (CMS) has been designed to reach high MCsx+ useful yields by allowing an optimization of c(Cs) in an instrument providing a high transmission via a high extraction field and a magnetic sector spectrometer. For this purpose the CMS instrument hasbeen equipped by several newly developed features, among which figures a sample stage and adapted collection optics allowing variations of the impactangle of the primary beam on the specimen at a constant primary energy. These variations of the incidence angle imply changes of the sputtering yieldY, which determines the Cs surface concentration according to c(Cs) = 1/(1+ Y). In this paper, we will study the improvement of secondary yields obtained on the CMS, in comparison with a classical Cameca IMS 4f, by making use of precisely this possibility to vary the sputtering yield. On both machines, analyses were performed on six different elements (B, F, Mg, S, As, and In) implanted in silicon samples. The observed variations of the useful yields are discussed in terms of the stationary cesium surface concentration incorporated in the specimen during the primary bombardment. Depending onthe element, useful yield enhancements ranging from a factor 7 to a factor80 can be observed between the CMS and the Cameca IMS 4f. This finding canbe explained by the fact that the CMS allows to reach lower stationary Cs surface concentrations, which are close to the optimum value for the investigated samples. (C) 2001 Elsevier Science B.V.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 28/01/20 alle ore 14:52:00