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Titolo:
TIME-RESOLVED X-RAY-DIFFRACTION MEASUREMENT OF SILICON SURFACE DURINGLASER IRRADIATION UNDER GRAZING-INCIDENCE CONDITIONS
Autore:
KOJIMA S; LIU KY; KUDO Y; KAWADO S; ISHIKAWA T; MATSUSHITA T;
Indirizzi:
SONY CORP,RES CTR,HODOGAYA KU YOKOHAMA KANAGAWA 240 JAPAN UNIV TOKYO,FAC ENGN,BUNKYO KU TOKYO 113 JAPAN NATL LAB HIGH ENERGY PHYS,PHOTON FACTORY TSUKUBA IBARAKI 305 JAPAN GRAD UNIV ADV STUDIES,DEPT SYNCHROTRON RADIAT SCI TSUKUBA IBARAKI 305JAPAN
Titolo Testata:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
fascicolo: 10, volume: 33, anno: 1994,
pagine: 5612 - 5616
SICI:
0021-4922(1994)33:10<5612:TXMOSS>2.0.ZU;2-E
Fonte:
ISI
Lingua:
ENG
Soggetto:
LATTICE DEFORMATION; MEASUREMENT SYSTEM; MULTIPOLE WIGGLER; CRYSTALS;
Keywords:
TIME-RESOLVED MEASUREMENT; ND-YAG LASER; SILICON; SURFACE LATTICE DEFORMATION; OUT-OF-PLANE REFLECTION; GRAZING INCIDENCE CONDITION;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Science Citation Index Expanded
Citazioni:
14
Recensione:
Indirizzi per estratti:
Citazione:
S. Kojima et al., "TIME-RESOLVED X-RAY-DIFFRACTION MEASUREMENT OF SILICON SURFACE DURINGLASER IRRADIATION UNDER GRAZING-INCIDENCE CONDITIONS", JPN J A P 1, 33(10), 1994, pp. 5612-5616

Abstract

The time-resolved X-ray diffraction measurement under frequency-doubled Nd:YAG laser (lambda=0.53 mu m) irradiation was carried out using the ''out of plane'' reflections at the BL-16 (MPW-beamline) in the Photon Factory (KEK). The ''out of plane'' 333 reflection showed that thelattice expansion in the lateral direction due to the present pulsed-laser irradiation was negligible. From the skew 422 reflection at a glancing angle of 2.3 mrad, which was near the critical angle for the total reflection, the temperature rise in silicon thin surface layers (less than 75 nm) was estimated to be 210 degrees C from the shift of peak position at 50 us after laser irradiation at a laser power density of 160 mJ/cm(2).

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 06/04/20 alle ore 04:53:16