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Titolo:
Zirconium tin titanate thin films via aqueous polymeric precursor route
Autore:
Bianco, A; Viticoli, M; Gusmano, G; Paci, M; Padeletti, G; Scardi, P;
Indirizzi:
Univ Roma Tor Vergata, Dipartimento Sci & Tecnol Chim, I-00133 Rome, ItalyUniv Roma Tor Vergata Rome Italy I-00133 ecnol Chim, I-00133 Rome, Italy CNR, ICMAT, Area Ric Montelibretti, Monterontondo Stn, Rome, Italy CNR Rome Italy , Area Ric Montelibretti, Monterontondo Stn, Rome, Italy Univ Trent, Dipartimento Ingn Mat, Trent, Italy Univ Trent Trent ItalyUniv Trent, Dipartimento Ingn Mat, Trent, Italy
Titolo Testata:
MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS
fascicolo: 1-2, volume: 15, anno: 2001,
pagine: 211 - 213
SICI:
0928-4931(20010820)15:1-2<211:ZTTTFV>2.0.ZU;2-Y
Fonte:
ISI
Lingua:
ENG
Soggetto:
POWDERS;
Keywords:
zirconium tin tinate; dielectric; thin film;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
12
Recensione:
Indirizzi per estratti:
Indirizzo: Bianco, A Univ Roma Tor Vergata, Dipartimento Sci & Tecnol Chim, Via Ric Sci, I-00133 Rome, Italy Univ Roma Tor Vergata Via Ric Sci Rome Italy I-00133 ome, Italy
Citazione:
A. Bianco et al., "Zirconium tin titanate thin films via aqueous polymeric precursor route", MAT SCI E C, 15(1-2), 2001, pp. 211-213

Abstract

Zirconium titanate-based thin films are considered as a promising dielectric material for the next generation of integrated microwave devices. The zirconium tin titanate (ZTS) precursor was prepared via a polymeric precursorprocess in aqueous phase. based on the citrate route. The presented chemical procedure is original for this kind of materials. C-13 nuclear magnetic resonance (NMR) spectra showed that stable mixed-metal chelate complex has been formed. The viscous resin was multiple spin-coated with intermediate firings at 300 degreesC onto platinized Si substrates and fired in air at 700 degreesC. Thin films 200-nm thick were obtained. Atomic force microscope (AFM) analysis showed that the coverage is homogeneous, the surface textureconsisting of elongated grains of average size 20 X 36 nm. Grazing incidence X-ray diffraction analysis (GIXRD) indicated that only the zirconium tintitanate phase is present within the examined range of penetration depth. (C) 2001 Elsevier Science BN. AA rights reserved.

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Documento generato il 01/10/20 alle ore 16:14:47