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Titolo:
Growth of HgCdTe for long-wavelength infrared detectors using automated control from spectroscopic ellipsometry measurements
Autore:
Phillips, J; Edwall, D; Lee, D; Arias, J;
Indirizzi:
Rockwell Int Sci Ctr, Thousand Oaks, CA 91360 USA Rockwell Int Sci Ctr Thousand Oaks CA USA 91360 ousand Oaks, CA 91360 USA
Titolo Testata:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
fascicolo: 4, volume: 19, anno: 2001,
pagine: 1580 - 1584
SICI:
1071-1023(200107/08)19:4<1580:GOHFLI>2.0.ZU;2-6
Fonte:
ISI
Lingua:
ENG
Soggetto:
MBE HGCDTE; HG1-XCDXTE; TRANSMISSION; PHOTODIODES;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
--discip_EC--
Citazioni:
15
Recensione:
Indirizzi per estratti:
Indirizzo: Phillips, J Rockwell Int Sci Ctr, 1049 Camino Dos Rios, Thousand Oaks, CA 91360 USA Rockwell Int Sci Ctr 1049 Camino Dos Rios Thousand Oaks CA USA 91360
Citazione:
J. Phillips et al., "Growth of HgCdTe for long-wavelength infrared detectors using automated control from spectroscopic ellipsometry measurements", J VAC SCI B, 19(4), 2001, pp. 1580-1584

Abstract

Hg1-xCdxTe is the leading material for high-performance long-wavelength (lambda similar to 10-20 mum) infrared detectors. At these wavelengths, highly accurate compositional control (Deltax less than or equal to 0.002) is required to achieve a particular device cutoff and the detector's performancecharacteristics. Spectroscopic ellipsometry has proven to be a highly accurate technique of measuring the HgCdTe composition during epitaxial growth. Here we present the growth of HgCdTe by molecular beam epitaxy using an automated control program using real-time feedback from spectroscopic ellipsometry measurements. Excellent control is demonstrated for more than 50 growth runs with a standard deviation of Deltax = 0.0004 observed for the errorbetween the composition measured by ellipsometry and the target growth composition. (C) 2001 American Vacuum Society.

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Documento generato il 05/04/20 alle ore 03:32:29