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Titolo:
A simulation-based experiment for comparing AMHS performance in a semiconductor fabrication facility
Autore:
Mackulak, GT; Savory, P;
Indirizzi:
Arizona State Univ, Dept Ind Engn, Tempe, AZ 85287 USA Arizona State UnivTempe AZ USA 85287 Dept Ind Engn, Tempe, AZ 85287 USA Univ Nebraska, Dept Ind & Management Syst Engn, Lincoln, NE 68588 USA UnivNebraska Lincoln NE USA 68588 ement Syst Engn, Lincoln, NE 68588 USA
Titolo Testata:
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
fascicolo: 3, volume: 14, anno: 2001,
pagine: 273 - 280
SICI:
0894-6507(200108)14:3<273:ASEFCA>2.0.ZU;2-Q
Fonte:
ISI
Lingua:
ENG
Keywords:
discrete event simulation; inventory control; materials handling; semiconductor device manufacture;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Engineering, Computing & Technology
--discip_EC--
Citazioni:
4
Recensione:
Indirizzi per estratti:
Indirizzo: Mackulak, GT Arizona State Univ, Dept Ind Engn, Tempe, AZ 85287 USA Arizona State Univ Tempe AZ USA 85287 n, Tempe, AZ 85287 USA
Citazione:
G.T. Mackulak e P. Savory, "A simulation-based experiment for comparing AMHS performance in a semiconductor fabrication facility", IEEE SEMIC, 14(3), 2001, pp. 273-280

Abstract

As the cost and complexity of constructing a semiconductor fabrication facility increases, responsive tools are needed for designing and planning itsoperations. Discrete-event simulation paired with design of experiments isan effective combination. This article demonstrates how simulation in combination with design of experiments is used to compare the intrabay layout of two automated material handling systems. The difference in stocker robot utilization, number of vehicle moves per hour, and average delivery time for the two intrabay layouts will be compared using a fractional factorial experimental design. The study demonstrates that the distributed storage option is preferable for maximizing manufacturing performance. The solution procedure has general applicability as a tutorial for practitioners.

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Documento generato il 04/04/20 alle ore 21:30:31