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Titolo:
Evolution of surface topography of fused silica by ion beam sputtering
Autore:
Flamm, D; Frost, F; Hirsch, D;
Indirizzi:
Inst Oberflachenmodifizierung, D-04318 Leipzig, Germany Inst Oberflachenmodifizierung Leipzig Germany D-04318 8 Leipzig, Germany
Titolo Testata:
APPLIED SURFACE SCIENCE
fascicolo: 1-4, volume: 179, anno: 2001,
pagine: 95 - 101
SICI:
0169-4332(20010716)179:1-4<95:EOSTOF>2.0.ZU;2-8
Fonte:
ISI
Lingua:
ENG
Soggetto:
KURAMOTO-SIVASHINSKY EQUATION; INDUCED RIPPLE TOPOGRAPHY; ROUGHENING INSTABILITY; ERODED GRAPHITE; BOMBARDED INP; EROSION; ENERGY; SI; MORPHOLOGY; DIFFUSION;
Keywords:
sputtering; topography; ripple; scaling; atomic force microscopy; fused silica;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
29
Recensione:
Indirizzi per estratti:
Indirizzo: Frost, F Inst Oberflachenmodifizierung, Permoserstr 15, D-04318 Leipzig, Germany Inst Oberflachenmodifizierung Permoserstr 15 Leipzig Germany D-04318
Citazione:
D. Flamm et al., "Evolution of surface topography of fused silica by ion beam sputtering", APPL SURF S, 179(1-4), 2001, pp. 95-101

Abstract

The evolution of the surface topography of fused silica during low-energy Ar ion beam sputtering was studied by atomic force microscopy. Depending onthe incidence angle of the ion beam and the ion energy the topography was dominated by regular ripple structures with an orientation perpendicular orparallel to the ion beam direction and a characteristic wavelength), between 30 and 300 nm. The time evolution of the ripple wavelength follows the power law lambda similar to t while gamma depends on the ion beam parameters. In addition, we found a distinct energy dependence of the ripple wavelength as well as the resulting scaling behaviour of the surface roughness. These results will be discussed within the limits of existing continuum models for surface erosion by ion sputtering. (C) 2001 Elsevier Science B.V. All rights reserved.

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Documento generato il 03/12/20 alle ore 12:54:59