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Titolo:
Evaluation of AFM tips using nanometer-sized structures induced by ion sputtering
Autore:
Frost, F; Hirsch, D; Schindler, A;
Indirizzi:
Inst Oberflachenmodifizierung eV, D-04318 Leipzig, Germany Inst Oberflachenmodifizierung eV Leipzig Germany D-04318 eipzig, Germany
Titolo Testata:
APPLIED SURFACE SCIENCE
fascicolo: 1-4, volume: 179, anno: 2001,
pagine: 8 - 12
SICI:
0169-4332(20010716)179:1-4<8:EOATUN>2.0.ZU;2-4
Fonte:
ISI
Lingua:
ENG
Soggetto:
ATOMIC-FORCE MICROSCOPE; ROUGHENING INSTABILITY; PATTERN-FORMATION; RIPPLE FORMATION; BOMBARDED INP; SCALING LAWS; SURFACES; EVOLUTION; ENERGY; IMAGES;
Keywords:
sputtering; topography; morphology; atomic force microscopy; AFM tip; thin film;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
22
Recensione:
Indirizzi per estratti:
Indirizzo: Frost, F Inst Oberflachenmodifizierung eV, Permoserstr 15, D-04318 Leipzig, Germany Inst Oberflachenmodifizierung eV Permoserstr 15 Leipzig Germany D-04318
Citazione:
F. Frost et al., "Evaluation of AFM tips using nanometer-sized structures induced by ion sputtering", APPL SURF S, 179(1-4), 2001, pp. 8-12

Abstract

In this study, we report on a process for the fabrication of nanometer-sized surface structures using low-energy Ar+ sputtering of InP surfaces. The dimension of these structures (less than or equal to 100 nm) and the distance between them can be tuned by the parameters of the sputter process (sputter time, ion energy, ion incidence angle, sputter time, and ion current density or ion flux, respectively). With the help of surfaces prepared by this way. we have evaluated the influence of the actual AFM tip quality on themeasured surface topography. Furthermore, we have shown that the tip quality has a strong influence on the surface roughness parameters extracted from the AFM images particularly for surfaces with a low surface roughness (similar to1 nm) as generally obtained by means of thin film technologies. (C)2001 Elsevier Science B.V. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 25/11/20 alle ore 03:05:30