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Titolo:
Hexagonal AlN films grown on nominal and off-axis Si(001) substrates
Autore:
Lebedev, V; Jinschek, J; Krausslich, J; Kaiser, U; Schroter, B; Richter, W;
Indirizzi:
Univ Jena, Inst Festkorperphys, D-07743 Jena, Germany Univ Jena Jena Germany D-07743 nst Festkorperphys, D-07743 Jena, Germany Univ Jena, Inst Quantenelekt, D-07743 Jena, Germany Univ Jena Jena Germany D-07743 Inst Quantenelekt, D-07743 Jena, Germany
Titolo Testata:
JOURNAL OF CRYSTAL GROWTH
fascicolo: 3-4, volume: 230, anno: 2001,
pagine: 426 - 431
SICI:
0022-0248(200109)230:3-4<426:HAFGON>2.0.ZU;2-Y
Fonte:
ISI
Lingua:
ENG
Soggetto:
MBE; TEMPERATURE; SI(100); SI(111);
Keywords:
interfaces; nucleation; molecular beam epitaxy; nitrides;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
15
Recensione:
Indirizzi per estratti:
Indirizzo: Lebedev, V Univ Jena, Inst Festkorperphys, Max Wien Pl 1, D-07743 Jena, Germany Univ Jena Max Wien Pl 1 Jena Germany D-07743 743 Jena, Germany
Citazione:
V. Lebedev et al., "Hexagonal AlN films grown on nominal and off-axis Si(001) substrates", J CRYST GR, 230(3-4), 2001, pp. 426-431

Abstract

Nucleation and growth of wurtzite AIN layers on nominal and of axis Si(0 0I) substrates by plasma-assisted molecular beam epitaxy is reported. The nucleation and the growth dynamics have been studied in situ by reflection high-energy electron diffraction. For the films grown on the nominal Si(0 0 1) surface, cross-sectional transmission electron microscopy and X-ray diffraction investigations revealed a two-domain film structure (AlN1 and AIN) with an epitaxial orientation relationship of [0 0 0 1](AlN) parallel to [00 1](Si) and <0 1 (1) over bar 0 > AlN1 parallel to <(2) over bar 1 1 0 > AlN2 \ [1 1 0](Si). The epitaxial growth of single crystalline wurtzite AINthin films has been achieved on off-axis Si(0 0 1) substrates with an epitaxial orientation relationship of [0 0 0 1](AlN) parallel to the surface normal and <0 1 1 0 > (AlN) parallel to [1 1 0](Si). (C) 2001 Elsevier Science B.V. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 04/04/20 alle ore 09:04:05