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Titolo:
Fabrication of 1 x 8 multimode-interference optical power splitter based on InP using CH4/H-2 reactive ion etching
Autore:
Yu, JS; Moon, JY; Choi, SM; Lee, YT;
Indirizzi:
Kwangju Inst Sci & Technol, Dept Informat & Commun, Puk Gu, Kwangju 500712, South Korea Kwangju Inst Sci & Technol Kwangju South Korea 500712 00712, South Korea
Titolo Testata:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
fascicolo: 2A, volume: 40, anno: 2001,
pagine: 634 - 639
SICI:
0021-4922(200102)40:2A<634:FO1X8M>2.0.ZU;2-6
Fonte:
ISI
Lingua:
ENG
Soggetto:
BEAM-SPLITTERS; WAVE-GUIDES; COUPLERS; DEVICES; DESIGN;
Keywords:
optical power splitters; MMI; FD-BPM; InGaAsP/lnP; optical waveguides; RIE; semiconductor devices;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
23
Recensione:
Indirizzi per estratti:
Indirizzo: Lee, YT Kwangju Inst Sci & Technol, Dept Informat & Commun, Puk Gu, 1 Oryongdong, Kwangju 500712, South Korea Kwangju Inst Sci & Technol 1 OryongdongKwangju South Korea 500712
Citazione:
J.S. Yu et al., "Fabrication of 1 x 8 multimode-interference optical power splitter based on InP using CH4/H-2 reactive ion etching", JPN J A P 1, 40(2A), 2001, pp. 634-639

Abstract

1 x 8 multimode-interference (MMI) power splitters with a weakly guided ridge structure based on an InGaAsP/InP material for 1.55 mum operations weredesigned and fabricated. To determine the optimum etching condition of InPin CH4/H-2 plasma for the formation of MMI power splitters. the effects ofetching parameters, such as ROW rates of constituent gases, rf power, and process pressure on the etch rate and surface morphology were investigated. The fabricated 3-mum-wide adjacent straight waveguides have propagation losses of 2.91 dB/cm at 1.55 mum for transverse electric (TE) polarization. The device performances in terms of the thickness of the upper cladding layer were theoretically and experimentally compared. The polarization dependence of the MMI power splitters was investigated. For TE [transverse magnetic(TM)] polarization, the excess loss of the devices at an operating wavelength of 1.55 mum was 1.02 dB (1.95 dB) and the splitting ratio was 0.68 dB (1.13 dB).

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 30/03/20 alle ore 19:42:57