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Titolo:
Self-diffusion in extrinsic silicon using isotopically enriched Si-30 layer
Autore:
Nakabayashi, Y; Osman, HI; Segawa, T; Saito, K; Matsumoto, S; Murota, J; Wada, K; Abe, T;
Indirizzi:
Keio Univ, Dept Elect & Elect Engn, Kohoku Ku, Yokohama, Kanagawa 2238522,Japan Keio Univ Yokohama Kanagawa Japan 2238522 okohama, Kanagawa 2238522,Japan Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, JapanTohoku Univ Sendai Miyagi Japan 9808577 Ku, Sendai, Miyagi 9808577, Japan MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA MIT Cambridge MA USA 02139 , Dept Mat Sci & Engn, Cambridge, MA 02139 USA Sin Etsu Hosp, Isobe R&D Ctr, Gunma 3970127, Japan Sin Etsu Hosp Gunma Japan 3970127 p, Isobe R&D Ctr, Gunma 3970127, Japan
Titolo Testata:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
fascicolo: 3A, volume: 40, anno: 2001,
pagine: L181 - L182
SICI:
0021-4922(20010301)40:3A<L181:SIESUI>2.0.ZU;2-L
Fonte:
ISI
Lingua:
ENG
Keywords:
self-diffusion; stable Si-30 tracer; doping effect; silicon; isotopic heterostructure;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
10
Recensione:
Indirizzi per estratti:
Indirizzo: Nakabayashi, Y Keio Univ, Dept Elect & Elect Engn, Kohoku Ku, 3-14-1 Hiyoshi, Yokohama, Kanagawa 2238522, Japan Keio Univ 3-14-1 Hiyoshi Yokohama Kanagawa Japan 2238522 an
Citazione:
Y. Nakabayashi et al., "Self-diffusion in extrinsic silicon using isotopically enriched Si-30 layer", JPN J A P 2, 40(3A), 2001, pp. L181-L182

Abstract

Si self-diffusion coefficients were measured in intrinsic and extrinsic silicon at 900 degreesC using an isotopically enriched Si-30 layer. Si-30 profiles are determined by secondary ion mass spectrometry, Si self-diffusion is enhanced in a heavily B-doped sample, but differs little from intrinsic Si in heavily As or Sb-doped samples.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 03/04/20 alle ore 04:21:31