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Titolo:
Effect of an internal rotating current on low-frequency inductively coupled plasmas - art. no. 046402
Autore:
Tsakadze, EL; Ostrikov, KN; Xu, S; Jones, IR; Storer, R; Yu, MY; Lee, S;
Indirizzi:
Nanyang Technol Univ, NIE, Plasma Proc Lab, Singapore 637616, Singapore Nanyang Technol Univ Singapore Singapore 637616 gapore 637616, Singapore Flinders Univ S Australia, Dept Phys, Adelaide, SA 5001, Australia Flinders Univ S Australia Adelaide SA Australia 5001 , SA 5001, Australia Ruhr Univ Bochum, Inst Theoret Phys 1, D-44780 Bochum, Germany Ruhr Univ Bochum Bochum Germany D-44780 Phys 1, D-44780 Bochum, Germany Nagoya Univ, Dept Elect Engn, Nagoya, Aichi 4648603, Japan Nagoya Univ Nagoya Aichi Japan 4648603 Engn, Nagoya, Aichi 4648603, Japan Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore Nanyang Technol Univ Singapore Singapore 639798 gapore 639798, Singapore
Titolo Testata:
PHYSICAL REVIEW E
fascicolo: 4, volume: 6304, anno: 2001,
parte:, 2
pagine: 6402 -
SICI:
1063-651X(200104)6304:4<6402:EOAIRC>2.0.ZU;2-1
Fonte:
ISI
Lingua:
ENG
Soggetto:
FIELD CURRENT DRIVE; SPHERICAL TOKAMAK; SURFACE-WAVES; GLOBAL-MODEL; H-TRANSITION; ROTAMAK-ST; DISCHARGES; HYSTERESIS; OPERATION; COIL;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
29
Recensione:
Indirizzi per estratti:
Indirizzo: Xu, S Nanyang Technol Univ, NIE, Plasma Proc Lab, 1 Nanyang Walk, Singapore 637616, Singapore Nanyang Technol Univ 1 Nanyang Walk Singapore Singapore 637616 pore
Citazione:
E.L. Tsakadze et al., "Effect of an internal rotating current on low-frequency inductively coupled plasmas - art. no. 046402", PHYS REV E, 6304(4), 2001, pp. 6402

Abstract

The effect of an internal low-frequency rotating current on inductively coupled plasmas in cylindrical chambers is studied. The electromagnetic fieldstructure, power density distribution, the plasma density, and the operating regimes of the discharge are investigated using electrodynamic, power, and particle balance equations. It is shown that the rotating current sheet can dramatically improve the uniformity of the electromagnetic fields and the power transferred to the plasma electrons from that of conventional low-frequency inductively coupled plasma sources with external flat spiral inductive coils.

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Documento generato il 09/07/20 alle ore 20:54:30