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Titolo:
Measurement of electron beam broadening in stainless steels during EDS analysis in the FEG-TEM
Autore:
Nakata, K; Okada, O; Ueki, Y;
Indirizzi:
Hitachi Ltd, Hitachi Res Lab, Dept Mat 2, Hitachi, Ibaraki 3170079, Japan Hitachi Ltd Hitachi Ibaraki Japan 3170079 Hitachi, Ibaraki 3170079, Japan Hitachi Sci Syst Ltd, Hitachinaka, Ibaraki 3128504, Japan Hitachi Sci SystLtd Hitachinaka Ibaraki Japan 3128504 aki 3128504, Japan
Titolo Testata:
JOURNAL OF ELECTRON MICROSCOPY
fascicolo: 2, volume: 50, anno: 2001,
pagine: 89 - 96
SICI:
0022-0744(2001)50:2<89:MOEBBI>2.0.ZU;2-K
Fonte:
ISI
Lingua:
ENG
Soggetto:
STRESS-CORROSION CRACKING; SPATIAL-RESOLUTION; MICROSCOPE; IRRADIATION; SEGREGATION; THICKNESS;
Keywords:
electron beam broadening; spatial resolution; FEG-TEM; EDS; stainless steel; foil thickness;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Life Sciences
Citazioni:
17
Recensione:
Indirizzi per estratti:
Indirizzo: Nakata, K NFD, 2163 Naritacho, Oarai, Ibaraki 3111313, Japan NFD 2163 Naritacho Oarai Ibaraki Japan 3111313 ki 3111313, Japan
Citazione:
K. Nakata et al., "Measurement of electron beam broadening in stainless steels during EDS analysis in the FEG-TEM", J ELEC MICR, 50(2), 2001, pp. 89-96

Abstract

The effect of electron beam broadening on spatial resolution of EDS analysis in a 200 kV cold-FEG-TEM has been investigated for Type 316L stainless steel. Platinum (Pt) was evaporated on half the 316L TEM foil surface, and the difference in Pt concentration profiles obtained by the EDS method from the Pt evaporated surface and its opposite side was analysed as a function of foil thickness. Advantages of Pt use are that Pt is not included in the 316L steel, and it is easily formed as a stable and continuous thin evaporated film on the stainless steel. No change of spatial resolution caused by electron beam broadening was observed in stainless steel foils of less thanabout 140 nm thick subjected to EDS analysis with the FEG-TEM (incident probe size 1.6 +/- 0.2 nm diameter). Specimens of about 160 nm and more thickhad a decrease in spatial resolution, but the decrease was smaller than that predicted from theoretical calculations of beam broadening for stainlesssteels. It is suggested that only the central part of the broadened electron beam with high intensity influences the spatial resolution of EDS analysis with the FEG-TEM.

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Documento generato il 05/07/20 alle ore 13:04:07