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Titolo:
Electrochemical micromachining of titanium through a laser patterned oxidefilm
Autore:
Chauvy, PF; Hoffmann, P; Landolt, D;
Indirizzi:
Ecole Polytech Fed Lausanne, Dept Mat, Lab Met Chim, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne Lausanne Switzerland CH-1015 ne, Switzerland Ecole Polytech Fed Lausanne, Inst Opt Appliquee, Dept Microtech, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne Lausanne Switzerland CH-1015 ne, Switzerland
Titolo Testata:
ELECTROCHEMICAL AND SOLID STATE LETTERS
fascicolo: 5, volume: 4, anno: 2001,
pagine: C31 - C34
SICI:
1099-0062(200105)4:5<C31:EMOTTA>2.0.ZU;2-J
Fonte:
ISI
Lingua:
ENG
Soggetto:
ND-YAG-LASER; STAINLESS-STEEL; METAL-FILMS; TI; ELECTROLYTES; IRRADIATION; DEPOSITION; OXIDATION; ALUMINUM; ALLOYS;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
25
Recensione:
Indirizzi per estratti:
Indirizzo: Chauvy, PF Ecole Polytech Fed Lausanne, Dept Mat, Lab Met Chim, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne Lausanne Switzerland CH-1015 land
Citazione:
P.F. Chauvy et al., "Electrochemical micromachining of titanium through a laser patterned oxidefilm", EL SOLID ST, 4(5), 2001, pp. C31-C34

Abstract

Selective dissolution of titanium through a laser patterned oxide film hasbeen achieved in a 3 M sulfuric acid-methanol electrolyte. The 250 nm thick oxide film was formed anodically on a flat titanium surface in 0.5 M sulfuric acid. The patterning of the film was obtained by local irradiation using a long pulse XeCl eximer laser. Electrochemical dissolution at irradiated lines on the oxide film yielded well-defined grooves comparable to those resulting from electrochemical micromachining through a photoresist mask. The described process permits electrochemical micromachining of titanium without photoresist and thus can lead to new applications of this technique. (C) 2001 The Electrochemical Society. All rights reserved.

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Documento generato il 04/04/20 alle ore 02:32:12