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Titolo:
High-frequency method to determine SiC crystal conductivity
Autore:
Shturbin, AV; Titkov, IE; Panevin, VY; Witman, RF;
Indirizzi:
St Petersburg State Tech Univ, Dept Semicond Phys & Nanoelect, St Petersburg 195251, Russia St Petersburg State Tech Univ St Petersburg Russia 195251 195251, Russia RAS, AF Ioffe Physicotech Inst, St Petersburg 194021, Russia RAS St Petersburg Russia 194021 otech Inst, St Petersburg 194021, Russia
Titolo Testata:
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
fascicolo: 1-3, volume: 4, anno: 2001,
pagine: 205 - 207
SICI:
1369-8001(200102/06)4:1-3<205:HMTDSC>2.0.ZU;2-F
Fonte:
ISI
Lingua:
ENG
Keywords:
silicon carbide; high frequency; non-destructive; conductivity;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
--discip_EC--
Citazioni:
7
Recensione:
Indirizzi per estratti:
Indirizzo: Titkov, IE St Petersburg State Tech Univ, Dept Semicond Phys & Nanoelect, Politechnicheskaya Str 29, St Petersburg 195251, Russia St Petersburg StateTech Univ Politechnicheskaya Str 29 St Petersburg Russia 195251
Citazione:
A.V. Shturbin et al., "High-frequency method to determine SiC crystal conductivity", MAT SC S PR, 4(1-3), 2001, pp. 205-207

Abstract

In this paper, we present a simple non-destructive method for testing SiC plate single crystals of any size and shape. The method is based on measuring the impedance changes of an inductive ferrite-cored coil due to placing the sample into the core gap. The method is valid for any SiC polytypes, though we used 6H one. Using this method we have obtained and discussed a conductivity as a function of doping level (N-d-N-a) for 6H-SiC Lely crystals. The conductivity measurements were carried out with alternating current of747 kHz frequency. The sensitivity of the method is limited by minimal conductivity 1 Omega (-1)cm(-1) (that is corresponding to (N-d-N-a)-2 x 10(16)cm(-3) for 6HSiC:N Lely crystals). (C) 2001 Elsevier Science Ltd. All rights reserved.

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Documento generato il 05/04/20 alle ore 02:33:12