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Titolo:
High temperature annealing of hydrogenated amorphous silicon carbide thin films
Autore:
Wang, YH; Lin, JY; Huan, CHA; Feng, ZC; Chua, SJ;
Indirizzi:
Natl Univ Singapore, Dept Phys, Singapore 119260, Singapore Natl Univ Singapore Singapore Singapore 119260 ngapore 119260, Singapore Inst Mat Res & Engn, Singapore 117602, Singapore Inst Mat Res & Engn Singapore Singapore 117602 ngapore 117602, Singapore
Titolo Testata:
THIN SOLID FILMS
fascicolo: 2, volume: 384, anno: 2001,
pagine: 173 - 176
SICI:
0040-6090(20010315)384:2<173:HTAOHA>2.0.ZU;2-R
Fonte:
ISI
Lingua:
ENG
Soggetto:
CHEMICAL-VAPOR-DEPOSITION; SIC FILMS; GROWTH; SI(100);
Keywords:
annealing; 3C-SiC; hydrogenated amorphous silicon carbide; epitaxy;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
15
Recensione:
Indirizzi per estratti:
Indirizzo: Lin, JY Natl Univ Singapore, Dept Phys, Singapore 119260, Singapore Natl Univ Singapore Singapore Singapore 119260 119260, Singapore
Citazione:
Y.H. Wang et al., "High temperature annealing of hydrogenated amorphous silicon carbide thin films", THIN SOL FI, 384(2), 2001, pp. 173-176

Abstract

Hydrogenated amorphous silicon carbide thin films were prepared by plasma-enhanced chemical vapor deposition on Si substrate at 220 degreesC with a rf power of 50 W, the high temperature annealing effect on these films was investigated. A wide range of techniques was used to study crystal structure, and relative C/Si content of the films. Nearly stoichiometric polycrystalline 3C-SiC films were obtained from the Si-rich amorphous hydrogenated silicon carbide films after high temperature annealing in a vacuum at the temperatures above 1000 degreesC. With increasing temperature, the polycrystalline film becomes statistically oriented along the (100) plane, but without any obvious epitaxial relation to the Si substrate. (C) 2001 Elsevier Science B.V. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 20/09/20 alle ore 07:35:34