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Titolo:
Consideration of deformation of TiN thin films with preferred orientation prepared by ion-beam-assisted deposition
Autore:
Hayashi, T; Matsumuro, A; Watanabe, T; Mori, T; Takahashi, Y; Yamaguchi, K;
Indirizzi:
Nagoya Univ, Dept Mech Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan Nagoya Univ Nagoya Aichi Japan 4648603 a Ku, Nagoya, Aichi 4648603, Japan Nagoya Univ, Dept Micro Syst Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan Nagoya Univ Nagoya Aichi Japan 4648603 a Ku, Nagoya, Aichi 4648603, Japan Mie Univ, Dept Mech Engn, Tsu, Mie 5148507, Japan Mie Univ Tsu Mie Japan 5148507 v, Dept Mech Engn, Tsu, Mie 5148507, Japan
Titolo Testata:
JSME INTERNATIONAL JOURNAL SERIES A-SOLID MECHANICS AND MATERIAL ENGINEERING
fascicolo: 1, volume: 44, anno: 2001,
pagine: 94 - 99
SICI:
1344-7912(200101)44:1<94:CODOTT>2.0.ZU;2-R
Fonte:
ISI
Lingua:
ENG
Keywords:
plasticity; anisotropy; hardness; titanium nitride; slip system; preferred orientation; ion-beam-assisted deposition; thin film; coating;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Engineering, Computing & Technology
Citazioni:
13
Recensione:
Indirizzi per estratti:
Indirizzo: Hayashi, T Nagoya Univ, Dept Mech Engn, Chikusa Ku, Nagoya, Aichi 4648603,Japan Nagoya Univ Nagoya Aichi Japan 4648603 a, Aichi 4648603, Japan
Citazione:
T. Hayashi et al., "Consideration of deformation of TiN thin films with preferred orientation prepared by ion-beam-assisted deposition", JSME A, 44(1), 2001, pp. 94-99

Abstract

Plastic deformation of TiN thin films with (111) and (200) preferred orientation was determined based on their hardness anisotropy. Hardness was measured by means of the nano-indentation technique. Plastic deformation of TiNfilms was caused by the indentation of the trigonal diamond tip, and evidence of this phenomenon was provided by cross-sectional scanning electron microscopy (SEM) observation and transmission electron diffraction (TED) analysis. The influence of the differences in residual stress and grain size onhardness anisotropy was restrictive, and hardness anisotropy can be explained by the anisotropy of yield stress as calculated using Schmid's law. This relationship suggests the existence of a {100}(110) slip system in the TiN crystal. Transmission electron microscopy (TEM) observation of brittle cracks in TiN films confirmed that these cracks are caused not by cleavage fractures but by intergranular fractures.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 08/04/20 alle ore 06:26:22