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Titolo:
Diamond synthesis by plasma jet above a liquid surface
Autore:
Suzuki, T; Wada, S; Tsukada, M; Yamazaki, T; Noma, T;
Indirizzi:
Tokyo Univ Agr & Technol, Fac Technol, Dept Appl Chem, Tokyo 1848588, Japan Tokyo Univ Agr & Technol Tokyo Japan 1848588 Chem, Tokyo 1848588, Japan Tokyo Inst Technol, Dept Inorgan Mat, Tokyo 1528552, Japan Tokyo Inst Technol Tokyo Japan 1528552 Inorgan Mat, Tokyo 1528552, Japan Hoya Co, EO Co, MD Div, Yamanashi 4088550, Japan Hoya Co Yamanashi Japan4088550 EO Co, MD Div, Yamanashi 4088550, Japan
Titolo Testata:
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
fascicolo: 3, volume: 21, anno: 2001,
pagine: 331 - 334
SICI:
0955-2219(200103)21:3<331:DSBPJA>2.0.ZU;2-P
Fonte:
ISI
Lingua:
ENG
Soggetto:
CHEMICAL-VAPOR-DEPOSITION; ETHYLENE GLYCOL SOLUTION;
Keywords:
CVD; deposition; diamond; films; plasma deposition;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
12
Recensione:
Indirizzi per estratti:
Indirizzo: Suzuki, T Tokyo Univ Agr & Technol, Fac Technol, Dept Appl Chem, Tokyo 1848588, Japan Tokyo Univ Agr & Technol Tokyo Japan 1848588 yo 1848588, Japan
Citazione:
T. Suzuki et al., "Diamond synthesis by plasma jet above a liquid surface", J EUR CERAM, 21(3), 2001, pp. 331-334

Abstract

A new approach was proposed for the low-pressure diamond synthesis on high-resistant substrates using liquids as starting materials for carbon sources. The principle is to generate a DC plasma between the copper nozzle and the negatively-biased liquid surface under reduced pressure. The discharge continued with an applied voltage between 1.5 and 2 kV and at pressures between 30 and 50 kPa using a mixture of water- ethylene glycol solution. Plasma thus generated was led onto the silicon substrate placed horizontally and1 mm over the nozzle top. The deposits distributed almost concentrically centered at the point directly above the nozzle axis. After deposition for 1h, well-faceted diamond was formed in a limited region. The growth rate ofthe diamond film was 10 mum/h. (C) 2001 Elsevier Science Ltd. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 28/01/20 alle ore 14:48:15