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Titolo:
Significance of coating stress on substrate bow in large area processing of MCM
Autore:
Yang, KH; Im, JH; Heistand, RH;
Indirizzi:
Dow Chem Co, Mat Res & Synth Lab, Midland, MI 48674 USA Dow Chem Co Midland MI USA 48674 t Res & Synth Lab, Midland, MI 48674 USA Dow Chem Co, Adv Elect Mat Lab, Midland, MI 48674 USA Dow Chem Co MidlandMI USA 48674 Adv Elect Mat Lab, Midland, MI 48674 USA AVX Corp, Myrtle Beach, SC 29578 USA AVX Corp Myrtle Beach SC USA 29578AVX Corp, Myrtle Beach, SC 29578 USA
Titolo Testata:
IEEE TRANSACTIONS ON ADVANCED PACKAGING
fascicolo: 1, volume: 24, anno: 2001,
pagine: 33 - 36
SICI:
1521-3323(200102)24:1<33:SOCSOS>2.0.ZU;2-G
Fonte:
ISI
Lingua:
ENG
Keywords:
bow; coating stress; finite element analysis (FEA); gravity effect; large area substrate; large deflection analysis; small deflection analysis;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Engineering, Computing & Technology
--discip_EC--
Citazioni:
11
Recensione:
Indirizzi per estratti:
Indirizzo: Yang, KH Dow Chem Co, Mat Res & Synth Lab, Midland, MI 48674 USA Dow Chem Co Midland MI USA 48674 ynth Lab, Midland, MI 48674 USA
Citazione:
K.H. Yang et al., "Significance of coating stress on substrate bow in large area processing of MCM", IEEE T AD P, 24(1), 2001, pp. 33-36

Abstract

The substrate bow in a large area processing (LAP) was simulated using: a finite element analysis (FEA). The structures considered were aluminum (Al)and glass substrates of various thicknesses, and a coating from Photosensitive film thickness. It was found that the deflection of a large area substrate, e.g., 400 mm(2), could not always be obtained from the linear, small deflection theory even if the curvature might be small and the stress-strain behavior in the linear elastic regime, In this case, the nonlinear, largedeflection theory had to be adopted. Also, the gravity effect from the substrate weight turned out to be very significant and had to be incorporated as well. The simulation incorporating these two factors agreed well with the experimental data, which was generated by spin coating and curing the BCBformulation on Al substrates, 400 x 400 x 1.27 mm. As a means of flattening out the curvature, subjecting a vacuum underneaththe substrate was simulated. Significant reduction of the substrate deflection was observed by applying only a very small vacuum. This result suggested that the use of double-stick tape on the bottom of the substrate, for example, might also be feasible to completely eliminate the bow.

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Documento generato il 03/07/20 alle ore 22:31:18