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Titolo:
Effect of stress on impurity-free quantum well intermixing
Autore:
Deenapanray, PNK; Jagadish, C;
Indirizzi:
Australian Natl Univ, Res Sch Phys Sci & Engn, Dept Elect Mat Engn, Canberra, ACT 0200, Australia Australian Natl Univ Canberra ACT Australia 0200 rra, ACT 0200, Australia
Titolo Testata:
ELECTROCHEMICAL AND SOLID STATE LETTERS
fascicolo: 2, volume: 4, anno: 2001,
pagine: G11 - G13
SICI:
1099-0062(200102)4:2<G11:EOSOIQ>2.0.ZU;2-W
Fonte:
ISI
Lingua:
ENG
Soggetto:
CAPPING LAYER; FREE INTERDIFFUSION; GAAS; DEPENDENCE; LASERS; HETEROSTRUCTURES; QUALITY;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Citazioni:
23
Recensione:
Indirizzi per estratti:
Indirizzo: Deenapanray, PNK Australian Natl Univ, Res Sch Phys Sci & Engn, Dept ElectMat Engn, Canberra, ACT 0200, Australia Australian Natl Univ Canberra ACTAustralia 0200 stralia
Citazione:
P.N.K. Deenapanray e C. Jagadish, "Effect of stress on impurity-free quantum well intermixing", EL SOLID ST, 4(2), 2001, pp. G11-G13

Abstract

Impurity-free interdiffusion of GaAs/AlGaAs quantum wells was investigatedfor SiOx capping layers grown by plasma-enhanced chemical vapor deposition. Dielectric layers were deposited for various nitrous oxide flow rates, N(30 sccm less than or equal to N less than or equal to 710 sccm), while maintaining a fixed silane flow rate. The oxygen content, x, of the dielectric increased monotonically with N and stoichiometric oxides were deposited above N = 350 sccm. However, the blue shift in quantum wells did not follow a similar trend as the variation of x. Following rapid thermal annealing, theblue shift increased with the increasing N to exhibit a maximum in the range 100 sccm < N < 200 sccm. Any further increase in N resulted in a decrease in blue shift, which reached an almost constant value for N. 350 sccm. Itis shown that this maximum in the blue shift is due to the stress imposed by the SiOx layer on the GaAs/AlGaAs heterostructure. (C) 2001 The Electrochemical Society.

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Documento generato il 14/07/20 alle ore 11:39:15