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Titolo:
UHV mu-electron beam evaluation of the CVD diamond particles grown on Si(001)
Autore:
Kono, S; Goto, T; Abukawa, T; Takakuwa, Y; Sato, K; Yagi, H; Ito, T;
Indirizzi:
Tohoku Univ, Res Inst Sci Measurements, Sendai, Miyagi 9808577, Japan Tohoku Univ Sendai Miyagi Japan 9808577 ts, Sendai, Miyagi 9808577, Japan Osaka Univ, Dept Elect Engn, Suita, Osaka 5650871, Japan Osaka Univ SuitaOsaka Japan 5650871 ct Engn, Suita, Osaka 5650871, Japan
Titolo Testata:
DIAMOND AND RELATED MATERIALS
fascicolo: 1, volume: 10, anno: 2001,
pagine: 48 - 58
SICI:
0925-9635(200101)10:1<48:UMBEOT>2.0.ZU;2-2
Fonte:
ISI
Lingua:
ENG
Soggetto:
VAPOR-DEPOSITED DIAMOND; PHOTOELECTRON YIELD SPECTROSCOPY; SINGLE-CRYSTAL DIAMOND; EMISSION PROPERTIES; SURFACE-STATES; AFFINITY; TRANSPORT; HYDROGEN; FILMS; NUCLEATION;
Keywords:
CVD; diamond; negative electron affinity; scanning electron microscopy;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
Engineering, Computing & Technology
Citazioni:
37
Recensione:
Indirizzi per estratti:
Indirizzo: Kono, S Tohoku Univ, Res Inst Sci Measurements, Sendai, Miyagi 9808577, Japan Tohoku Univ Sendai Miyagi Japan 9808577 ai, Miyagi 9808577, Japan
Citazione:
S. Kono et al., "UHV mu-electron beam evaluation of the CVD diamond particles grown on Si(001)", DIAM RELAT, 10(1), 2001, pp. 48-58

Abstract

The electronic and structural properties of diamond particles chemical. vapor deposition (CVD)-grown on Si(001) surfaces were studied using a scanning probe mu -electron beam with SEM, RHEED, secondary-electron spectroscopy (SES) and Anger-electron spectroscopy in ultra-high-vacuum (UHV) conditions. The CVD grown diamond particles studied were made with a source gas of either CO/H-2 (sample A) or CH4/H-2 (sample B) on Si(001). The UHV-SEM imagesshowed that sample A was composed of diamond particles with well-determined row-index surfaces while those for sample B with poorly determined surfaces. mu -RHEED patterns from diamond single-crystallites for sample A showedwell-developed. Kikuchi-bands together with surface spots indicating a good order of diamond framework near the surface. The diamond crystallites of-sample A Showed varieties of SES spectra and only a small fraction of them had negative electron affinity (NEA) although no differences are found in RHEED. The SES spectra for sample B showed that essentially all the diamond particles are NEA. It is found that the Fermi-level is located at similar to 1.0 eV above the valence band maximum for NEA diamond particles and similar to 1.5 eV for PEA ones. The change in electron affinity and the origin of surface conductive layers present on as-grown CVD diamonds are discussed in terms of the Fermi-level positions found presently. (C) 2001 Elsevier Science B.V. All rights reserved.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 06/04/20 alle ore 21:46:10