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Titolo:
Chemical, morphological and accumulation phenomena in ultrashort-pulse laser ablation of TiN in air
Autore:
Bonse, J; Sturm, H; Schmidt, D; Kautek, W;
Indirizzi:
Bundesanstalt Mat Prufung, Lab Dunnschichttechnologien, D-12205 Berlin, Germany Bundesanstalt Mat Prufung Berlin Germany D-12205 D-12205 Berlin, Germany Bundesanstalt Mat Prufung, Lab Polymeroberflachen & Schichten, D-12205 Berlin, Germany Bundesanstalt Mat Prufung Berlin Germany D-12205 D-12205 Berlin, Germany Bundesanstalt Mat Prufung, Lab Mikrobereichs & Oberflachenanalyse, Rasterelektronenmikroskopie, D-12205 Berlin, Germany Bundesanstalt Mat Prufung Berlin Germany D-12205 D-12205 Berlin, Germany
Titolo Testata:
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
fascicolo: 6, volume: 71, anno: 2000,
pagine: 657 - 665
SICI:
0947-8396(200012)71:6<657:CMAAPI>2.0.ZU;2-O
Fonte:
ISI
Lingua:
ENG
Soggetto:
SPUTTERED TITANIUM-NITRIDE; THIN-FILMS; OXIDATION BEHAVIOR; THERMAL-OXIDATION; SURFACE-DEFECTS; X-RAY; COATINGS; RUTILE; XPS; OXIDES;
Tipo documento:
Article
Natura:
Periodico
Settore Disciplinare:
Physical, Chemical & Earth Sciences
--discip_EC--
Citazioni:
33
Recensione:
Indirizzi per estratti:
Indirizzo: Bonse, J Bundesanstalt Mat Prufung, Lab Dunnschichttechnologien, Unter Eichen 87, D-12205 Berlin, Germany Bundesanstalt Mat Prufung Unter Eichen 87 Berlin Germany D-12205
Citazione:
J. Bonse et al., "Chemical, morphological and accumulation phenomena in ultrashort-pulse laser ablation of TiN in air", APPL PHYS A, 71(6), 2000, pp. 657-665

Abstract

Ultrashort-pulse laser ablation (tau = 130 fs, lambda = 800 nm, repetitionrate 2-20 Hz) of titanium nitride was investigated for laser influences between 0.3 and 4.5 J/cm(2) using the direct focusing technique in ail, The influence of the laser pulse number and the peak fluence was investigated bymeans of several surface analytical techniques (optical microscopy, dynamic friction atomic force microscopy, scanning Auger electron microscopy and small-spot electron spectroscopy for chemical analysis). The correlation ofthe results about optical, physical and chemical properties of the irradiated areas allows us to propose a simple oxidation model, which explains different observed phenomena associated with surface damage such as mound formation and crater widening and clarifies the incubation behavior reported earlier for this material.

ASDD Area Sistemi Dipartimentali e Documentali, Università di Bologna, Catalogo delle riviste ed altri periodici
Documento generato il 08/04/20 alle ore 12:11:07